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  • Non-Contact 3D Surface Metrology of Large Grain High Purity Niobium by SLCM and FESEM
    Abstract - Non-Contact 3D Surface Metrology of Large Grain High Purity Niobium by. SLCM and FESEM. Z.H. Sung, P.J. Lee and D.C, Larbalestier. Applied Superconductivity Center, National High Magnetic Field Laboratory,. Florida State University, FL, 32310. Microsoft Word - abstract_v1.2.doc
  • Optical Metrology for Large Telescope Optics
    quality. assurance throughout the process. Laser interferometry is the most widely used technique for verifying surface. quality of large optics. A laser interferometer measures the phase difference between beams reflecting from a. high quality reference optic and from a test optic. In a traditional
  • MICRO: Defect Analysis and Metrology - Ge (Feb 2000)
    of this technique. Two high-resolution defect review techniques, scanning electron microscopy (SEM) and atomic force microscopy (AFM), can be used to characterize deep submicron defects. While SEM provides information on lateral defect size and shape, it does not provide quantitative height information
  • Utilizing Laser Technology in Dimensional Metrology Applications
    The wavelength of light provides a very high resolution, linear, and stable reference for dimensional measurement. Labmaster(R) instruments effectively couple the wavelength of light to the part to be measured. They do this by using a fringe counting laser interferometer1 to detect linear motion
  • 3D Atomic Force Microscopy as an Alternative to X-SEM and TEM for Advanced Process Metrology (AN91) (.pdf)
    important for process benefit is its attractive cost savings. performance at a fraction of the cost. control. At 110nm and above, Unlike X-SEM and TEM, AFM The X3D reduces cost per wafer pass traditional top-down CD-SEMS (critical measurements are nondestructive by a factor as high as 10 and provides
  • MICRO: Defect/Yield Analysis and Metrology
    , and capacitors, which cannot be detected using traditional lamp-based optical inspection tools. E-beam inspection uses voltage contrast to detect defects that exhibit abnormal electrical behavior and are therefore called electrical defects. While its high resolution and large focal depth make E-beam inspection
  • Nanopositioning with ALIO Ceramic Stages and Galil Controllers (.pdf)
    When dealing with high precision, high resolution applications where positioning down to sub-micron resolution is critical - a ceramic stage coupled to a Galil controller is an excellent motion control solution. This application note describes the actual hardware that was used for a nanometer-level
  • SmartMovesTM Spotlights: Veeco Instruments, Inc. (.pdf)
    roughness and topography, with subnanometer resolution. The measurements are accurate, repeatable and high speed. Veeco chose Galil's Ethernet-based DMC-3425 motion controllers for its profilers because they provide a highly versatile and powerful form of distributed control where many controllers can

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