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High Resolution Metrology

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Interferometers measure distance in terms of wavelength and determine the wavelengths of light sources.
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Parts by Number for High Resolution Metrology Top

Part # Distributor Manufacturer Product Category Description
00124027 Amazon Hexagon Metrology, Inc. Industrial & Scientific Standard Gage 00124027 Outside Digital Micrometer, 3-4" Range, 0.0001" Graduation, +/-0.0002" Accuracy
07734004 Amazon Hexagon Metrology, Inc. Industrial & Scientific Standard Gage 07734004 LCD Electronic Height Gauge, 24" Measuring Range, 0.0005" Resolution, +/-0.0020" Accuracy
00124025 Amazon Hexagon Metrology, Inc. Industrial & Scientific Standard Gage 00124025 Outside Digital Micrometer, 1-2" Range, 0.0001" Graduation, +/-0.00016" Accuracy
00124024 Amazon Hexagon Metrology, Inc. Industrial & Scientific Standard Gage 00124024 Outside Digital Micrometer, 0-1" Range, 0.0001" Graduation, +/-0.00016" Accuracy
00124026 Amazon Hexagon Metrology, Inc. Industrial & Scientific Standard Gage 00124026 Outside Digital Micrometer, 2-3" Range, 0.0001" Graduation, +/-0.0002" Accuracy

Conduct Research Top

  • Non-Contact 3D Surface Metrology of Large Grain High Purity Niobium by SLCM and FESEM
    Abstract - Non-Contact 3D Surface Metrology of Large Grain High Purity Niobium by. SLCM and FESEM. Z.H. Sung, P.J. Lee and D.C, Larbalestier. Applied Superconductivity Center, National High Magnetic Field Laboratory,. Florida State University, FL, 32310. Microsoft Word - abstract_v1.2.doc...
  • MICRO: Defect/Yield Analysis & Metrology
    measurements of film-step heights were taken using a high-resolution profilometer, and, where required, field oxide thickness on polished wafers was checked using reflectometry. CMP Uniformity. Figure 1 presents an example of how optoacoustic instruments can be used to optimize the CMP process by analyzing...
  • Optical Metrology for Large Telescope Optics
    quality. assurance throughout the process. Laser interferometry is the most widely used technique for verifying surface. quality of large optics. A laser interferometer measures the phase difference between beams reflecting from a. high quality reference optic and from a test optic. In a traditional...
  • MICRO: Defect Analysis and Metrology - Ge (Feb 2000)
    of this technique. Two high-resolution defect review techniques, scanning electron microscopy (SEM) and atomic force microscopy (AFM), can be used to characterize deep submicron defects. While SEM provides information on lateral defect size and shape, it does not provide quantitative height information...
  • MICRO: Defect Metrology
    defects. Following the automated inspections, further defect review was performed using a scanning electron microscope (SEM). This high-resolution analysis aided in verifying and refining the automated grouping classifications. Two hundred random defects were reviewed, and the BF tool results and those...
  • MICRO: Defect/Yield Analysis and Metrology
    , and capacitors, which cannot be detected using traditional lamp-based optical inspection tools. E-beam inspection uses voltage contrast to detect defects that exhibit abnormal electrical behavior and are therefore called electrical defects. While its high resolution and large focal depth make E-beam inspection...
  • MICRO: Defect/Yield Analysis and Metrology
    /throughput trade-off. In general, throughput can be expected to decrease with the square of resolution. In practice, engineers often optimize this trade-off by inspecting the entire wafer at a somewhat lower resolution and then directing selected defects to a high-resolution review station...
  • Utilizing Laser Technology in Dimensional Metrology Applications
    The wavelength of light provides a very high resolution, linear, and stable reference for dimensional measurement. Labmaster(R) instruments effectively couple the wavelength of light to the part to be measured. They do this by using a fringe counting laser interferometer1 to detect linear motion...
  • Resolution, Accuracy and Repeatability
    are based on practical resolution. Low Accuracy. Low Repeatability. Low Accuracy. High Repeatability. High Accuracy. High Repeatability. Fine Resolution. Coarse Resolution. Downloads. PDF File. Site Index | Contact | Careers | Locate Sales Office | RSS Feed | Aerotech Ltd | Aerotech GmbH...
  • 3D Atomic Force Microscopy as an Alternative to X-SEM and TEM for Advanced Process Metrology (AN91) (.pdf)
    important for process benefit is its attractive cost savings. performance at a fraction of the cost. control. At 110nm and above, Unlike X-SEM and TEM, AFM The X3D reduces cost per wafer pass traditional top-down CD-SEMS (critical measurements are nondestructive by a factor as high as 10 and provides...

Engineering Web Search: High Resolution Metrology Top

Carl Zeiss SMT, Germany
2010-09-15: Carl Zeiss AURIGA 60 CrossBeam Workstation ? High Resolution Slicing and 3D-Imaging with Unrivaled Variety of Analytical Options
See Carl Zeiss SMT Information
Bruker - Analytical Instruments for IR, NIR, Raman, NMR, EPR,...
Bruker to Deliver an Ultra-High Mass Resolution 15 Tesla FTMS System for Petroleomics to ECOPETROL...
See Bruker Corporation Information
ESA - Space Science - Darwin overview
The constellation was proposed to carry out high-resolution imaging using aperture synthesis in order to provide pictures of celestial objects in
Interferometry - Wikipedia, the free encyclopedia

Scanning electron microscope - Wikipedia, the free...
mode, secondary electron imaging or SEI, the SEM can produce very high-resolution images of a sample surface, revealing details less than 1 nm in
High-Throughput Nanometrology with Scatterfield Microscopy
Optical microscopy (OM) is a high-throughput metrology methodology that provides a unique advantage since it is a high-bandwidth measurement method
See NIST (National Institute of Standards & Technology) Information
Jordan Valley Semiconductors | Jordan Valley Semiconductors,...
Strain Metrology High-K & Metal Gate Silicides
See Jordan Valley Semiconductors, Inc. Information
Physikalisch-Technische Bundesanstalt (PTB): High resolution...
Structure > Div. 5 Precision Engineering > 5.2 Dimensional Nanometrology > 5.25 Scanning Probe Metrology > High resolution probing systems
See Physikalisch-Technische Bundesanstalt (PTB) Information
Machine Vision | Computer | System | Measurement
Premier - Metrology + Surface Inspection High-speed data acquisition. High-speed, high-resolution video recordings for long duration.
See Boulder Imaging, Inc. Information
Instrumentation Division, Brookhaven National Laboratory
Lasers and Optical Metrology R&D of efficient, high quality photoelectron sources, optical version of particle detectors with high spatial and

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