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  • MICRO:January 1998:Product Technology News
    and maintains high throughput for all mask types. Spray Cleaner FSI International Chaska, MN Capable of cleaning 300-mm wafers, the Zeta surface-conditioning system can blend up to eight chemicals for process programming flexibility. The system accommodates a range of chemical blend ratios...
  • MICRO: Product Tech News
    of hazardous chemicals. Because the dry ice particles disappear on impact, the unit eliminates secondary waste streams. It is used for cleaning wafers, stripping high-dose implanted photoresists, cleaning polymer films off anodized or spray-coated aluminum chambers, cleaning valve bellows and quartzware...
  • TA022: Benefits and Challenges in Decreasing GaAs through Substrate via Size and Die Thickness
    or spray etch module with. A tapered via profile is desirable if a solder-stop is. their automated grinding systems. One vendor recently. required. For high-power PA die that require Au-Sn. introduced an automated, contact-less wafer thickness. eutectic solder die attach onto ceramic packages...
  • MICRO:Outlook 2000 (Nov '99)
    in the foreseeable future. Therefore, it is going to become increasingly important to understand any defect formation inside trenches, and high-aspect-ratio inspection, called HARI, is the area of concern here. Head, ULSI Technology Research Dept., We're pushing up against fundamental physical limits now in scaling...
  • Eliminating heavily implanted resist in sub-0.25-um devices
    in the carbon layer. The thickness of this carbonized layer is a function of the implant species, voltage, dose, and current. The underlying layer is bulk resist, which, as Figure 1 shows, typically has a high solvent content. Figure 1: Implanted resist has a carbonized skin layer and trapped solvent...
  • Temperature and Humidity Monitoring in Ice Wine Harvesting
    Store. Search Website. LiveZilla Live Help. Data Loggers. by Measurement. Temperature. Humidity. Voltage / Current. Strain Gauge. Vibrating Wire. Serial (RS-232). Universal Input. Other. by Application. Portable. Wireless. USB. High Speed. Vehicle. Environmental. Medical. Oven Profiling. Temperature...
  • Product Technology News
    of high aspect ratio. The high voltage within the column strongly attracts low-energy secondary electrons from the bottoms of deep structures. A patented multidetector gathers spatial 3-D information to attain pattern recognition with a 99% success rate. Throughput of 25 wafers/hr increases fab...
  • MICRO:Product Technology News (Oct. '98, p.110)
    cause of defects. Minimal gel breakthrough ensures a high rate of gel slug retention. The membrane's pores retain hard particles, making the filter suitable for use with advanced photolithography processes. Because the filter does not drip, it minimizes operator exposure to photochemicals during...

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Filter - search result, G&P International Machinery Co.,...
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