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  • MICRO:Top 40 Product Allstars (Nov/Dec '98)
    . The system can be incorporated into polishing systems made by OEMs such as Applied Materials, Ebara, IPEC/Planar, Speedfam, and Strasbaugh. The Point Source scrubber removes virtually all inorganic contaminants at an efficiency rate of 99.5%. The system can be used for hydrochloric acid, hydrogen

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