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  • High Flow Delivery Systems for Bulk Specialty Gases
    experiments to ensure saturated vapor phase in the purifiers. The results from testing bulk specialty gas purifiers for ammonia and hydrogen chloride under severe moisture challenges and various flow rates are described. The temperature changes were monitored throughout the delivery manifold
  • Products in Action
    process gases and is a process by-product. Potential sources of hydrogen leaks within a fab include bulk hydrogen delivery tanks, gas delivery lines, gas manifolds, valve boxes, regulators, the point at which a gas line enters a tool, and exhaust ducts. If hydrogen concentrations reach the flammable
  • U.S. Fuel Cell and Battery Patents | F C T | December 2007 |
    and methods, Ian WKaye and Qailmas Khan, UltraCell Corp. U.S.7,276,141 (20071002), Hydrogen gas sensor, Norihiko Nadanami, Norobu Ishida, Takafumi Oshima, Ryuji Inoue, and Tomonori Kondo, NGK Spark Plug Co., Ltd. (JP). U.S.7,276,214 (20071002), Chemical reactor, Anthony Matthew Johnston and Brian

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