Hydrophilic Cleaning Fluid

Conduct Research

• MICRO: Ultrapure Fluids - Winters (April 2000)
  ) for the purification of critical rinses in wafer manufacturing, the RinseGard point-of-use filter/purifier that was evaluated contains an ultrahigh-molecular-weight polyethylene membrane with a modified surface. Ion-exchange groups that are attached at the hydrophilic surface are able to extract specific metals...
• MICRO: Wet Surface Technology
  such as vias, contacts, deep trenches, and poly-Si features, where water spots form easily at hydrophilic/hydrophobic interfaces. Spots that are large enough to overlap more than one die will result in a definite yield loss, and even smaller water spots can cause killer defects, high leakage currents...
• MICRO:Archive:June 1997:Semicon Technical Programs
  Extractables in Fluid Handling Components Donald C. Grant, CT Associates Accelerated Qualification of Chemical Distribution Systems for New Fab Startup Reduction of BOE Bath Startup Times through Utilization of Hydrophilic Membrane Filter Media Purge and Commissioning Procedures for Bulk Liquid Delivery...
• MICRO:May 98:Product Technology News
  and 5000/500 systems specified at 70 nm. The Omega2000 cleaner/rinser/dryer produces particle-neutral hydrophobic or hydrophilic wafers @ 0.16 um using motionless surface tension gradient technology. The system's CleanPoint filter removes particles >=0.065 um from DI water. Mean time between failures is 3000...
• MICRO:Surface Chemistries, by Joseph Zahka, p.85 (March '99)
  , pressure wet Solvent, amines35 45 UPE, wets spontaneously or IPA wet PTFE, IPA wet Solvent, amines, water50 55 UPE, IPA wet PTFE, IPA wet Glycol, NH4F60 Hydrophilic UPEPTFE, IPA wet Table II: General filter material recommendations for photoresist strippers. Flow and Pressure Drop. As fluid flows...
• Product Technology News
  it hydrophilic. The filter operates at temperatures <165 F. It is available with Viton-A or Teflon-encapsulated Viton O-rings. 300-mm Isolation Tools Asyst Technologies Fremont, CA SMIF-300 isolation systems are designed for integration into process tools or for use by IC manufacturers as stocking...
• MICRO:Top 40 Product Allstars (Nov/Dec '98)
  or hydrophilic wafers @ 0.16 um using motionless surface tension gradient technology. The system's CleanPoint filter removes particles 0.065 um from DI water. Mean time between failures is 3000 hours. The system operates at room temperature, and the DI water is clean at discharge; no reprocessors...
• Tangential Flow Filtration Explores New Niches
  technology continues to make "incremental" improvements, notes Iverson. Choices for TFF boil down to either regenerated cellulose (RC) or polyether sulfone (PES). While filter choice is always applicationdependent, there is a trend toward RC because of its more hydrophilic character and lower binding...
• MICRO:Product Technology News (July '99)
  , 978/887-0022. (Semicon West, San Jose, McEnery Hall, Booth 15116) A disposable purifier from Millipore is designed to minimize defects associated with metal ion contamination. The Rinsegard HPX contains a hydrophilic ultrahigh-molecular-weight polyethylene membrane and a negatively charged surface...
• New low impact paper
  and the calendering process - the gap will surely disappear. The optimal base paper for the spray process has a hydrophobic inner structure and a hydrophilic surface. Too much absorbency leads to binder migration to the base paper and decreases surface strength. The biggest issue in base paper development...

Engineering Web Search: Hydrophilic Cleaning Fluid