Hydrophobic Cleaning Fluids

Conduct Research

• MICRO: Ultrapure Fluids by Anurag Kumar (Jan 2000)
  Anurag Kumar and Mark J. Camenzind, Organic contamination deposited on wafer surfaces from ultrapure water (UPW) can seriously undermine wafer-cleaning efficiency, which leads to nonuniform etching. In addition, carbon-rich hydrophobic wafer surfaces are known to affect gate-oxide growth rates...
• Optimized Deaeration System for Paulaner Brewery
  The Centec DGS System is a modular, water deaeration process that uses hydrophobic Hollow Fiber Membrane to remove dissolved gasses from liquids in the beverage industry. This technical brief covers the unit's design, operation and resulting reduction of energy consumption costs. Gas transfer...
• MICRO: Wet Surface Technology
  such as vias, contacts, deep trenches, and poly-Si features, where water spots form easily at hydrophilic/hydrophobic interfaces. Spots that are large enough to overlap more than one die will result in a definite yield loss, and even smaller water spots can cause killer defects, high leakage currents...
• MICRO:May 98:Product Technology News
  and 5000/500 systems specified at 70 nm. The Omega2000 cleaner/rinser/dryer produces particle-neutral hydrophobic or hydrophilic wafers @ 0.16 um using motionless surface tension gradient technology. The system's CleanPoint filter removes particles >=0.065 um from DI water. Mean time between failures is 3000...
• MICRO: Special Apps
  Silicon-Wafer Bonding. Direct wafer bonding is a three-step process that consists of surface preparation, contacting, and thermal annealing. The contacting step involves ultrafine alignment and face-to-face joining of two silicon wafers. Hydrophobic Si-Si bonding is a process for the direct bonding of two...
• Chromatography Roundup
  adsorber.This month, Pall Life Sciences (East Hills, N.Y.) launches two new mixed-mode sorbents, HEA and PPA HyperCel, new selectivities based upon the company's HyperCel matrix. The products exhibit both hydrophobic and ion-exchange characteristics, enabling process chromatographers to bind proteins under...
• MICRO:Product News
  of the processed air volume using a HoneyCombe rotor with hydrophobic zeolites. The concentrate can then be treated with an additional pollution control device such as an oxidizer or a solvent-recovery device. Complete systems are available, with the secondary pollution control device being either...
• Measuring a Filter's Performance
  a bubble; the larger pore, the less pressure required to form a bubble. Expressed in units of pounds per square inch (psi) or bar for membranes. Water Breakthrough is a measure of the amount of pressure required to transmit water through the largest pore of a dry hydrophobic filter. It serves...
• MICRO:Top 40 Product Allstars (Nov/Dec '98)
  (N)/Cu barrier/seed processes for copper interconnects. The source provides uniform bottom coverage of high-aspect-ratio devices without the use of a collimator. 300-mm Wafer Dryer YieldUP International Mountain View, CA The Omega2000 cleaner/rinser/dryer produces particle-neutral hydrophobic...
• MICRO:Top 30 (November/December 2001)
  . A high-pressure, hollow-fiber membrane is used for transferring gases to and from liquid streams. The X50 fiber membrane is made from thick-walled, microporous, hydrophobic polypropylene, which allows excellent CO2 removal from liquids. (Removing CO2 from ion-exchange beds helps reduce chemical use...

Engineering Web Search: Hydrophobic Cleaning Fluids