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Hydrophobic Etches

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  • MICRO:May 98:Product Technology News
    and 5000/500 systems specified at 70 nm. The Omega2000 cleaner/rinser/dryer produces particle-neutral hydrophobic or hydrophilic wafers @ 0.16 um using motionless surface tension gradient technology. The system's CleanPoint filter removes particles >=0.065 um from DI water. Mean time between failures is 3000...
  • MICRO: Industry News
    , the low-k, which is intrinsically hydrophobic, stays hydrophobic," Verhaverbeke points out. "The fact that it becomes hydrophilic during ash is an indication that you damaged it." A Marangoni-style cleaner for the process back end is an efficient solution, he says. "Marangoni immerses the whole wafer. We...
  • MICRO: Surface Conditioning/Chemistries - Song (January 2001)
    when the previously hydrophobic surface is rendered hydrophilic. The oxidation reaction also minimizes levels of total organic compounds. Figure 1: Simplified schematics of the DIO3 and SPM photoresist stripping processes. In DIO3 cleaning, resist is oxidized directly, whereas in SPM procedures...
  • Medical Device Link .
    their bonding capabilities or achieve totally new surface properties. Potential medical applications include modifications of hydrophilic, hydrophobic, low-friction, and barrier surface characteristics. This article will provide an overview of plasma technology, discussing current capabilities as well...
  • MICRO: Special Apps
    Silicon-Wafer Bonding. Direct wafer bonding is a three-step process that consists of surface preparation, contacting, and thermal annealing. The contacting step involves ultrafine alignment and face-to-face joining of two silicon wafers. Hydrophobic Si-Si bonding is a process for the direct bonding of two...
  • MICRO: Product Technology News
    with 0.1% resolution. Hollow-Fiber Membrane. Celgard. Charlotte, NC. A high-pressure, hollow-fiber membrane is used for transferring gases to and from liquid streams. The X50 fiber membrane is made from thick-walled, microporous hydrophobic polypropylene, which allows excellent CO2 removal from liquids...
  • MICRO: Wet Surface Technologies
    reduces the copper etch rate. As shown in Figures 1 and 2, second-generation post-CMP cleaners have a controlled, highly selective etch rate for CuO. Figure 2: Copper oxide etch rates for ESC794 cleaning solutions at 23 C. Both ESC784 and ESC794 have been shown to eliminate water marks on hydrophobic...
  • MICRO:Top 30 (November/December 2001)
    . A high-pressure, hollow-fiber membrane is used for transferring gases to and from liquid streams. The X50 fiber membrane is made from thick-walled, microporous, hydrophobic polypropylene, which allows excellent CO2 removal from liquids. (Removing CO2 from ion-exchange beds helps reduce chemical use...
  • MICRO: Brainstorming Team
    be a feasible method as long as we could create a hydrophobic surface in the area we wanted to sample.". After that point, it became a matter of "engineering the design of the jig to support and rotate the wafer, which did take some effort. Gary Donahue at Universal Engineering took our ideas...
  • Product Technology News
    shape combines high voids volume with a large filter area for efficient operation in recirculating etch applications. Made of PVDF, the filter has a removal rating of 0.1 um in recirculation mode. To maintain low levels, the inherently hydrophobic PVDF medium is modified chemically to make...

Engineering Web Search: Hydrophobic Etches

Oak Ridge National Laboratory - ORNL super water repellent...
Finally, Simpson treats the powder with a special hydrophobic solution to change the glass surface chemistry from hydrophilic to hydrophobic.
See Oak Ridge National Laboratory Information
Fabrication critical for low-cost MEMS
dielectrics typically used for waveguides are attacked by the etches needed to release silicon MEMS. To maintain compatibility with MEMS processing,
EE-527: MicroFabrication Wet Etching R. B. Darling / EE-527...
? Acetic acid is less polar than water and can help in achieving proper wetting of slightly hydrophobic Si wafers.
Journal of The Electrochemical Society, 151 1 G47-G56 2004 G47...

TB, SG, JMM/182778, 16/03/2005 INSTITUTE OF PHYSICS PUBLISHING...
Al2O3 ALD can be utilized to deposit robust and reliable hydrophobic coatings.
See University of Colorado at Boulder Information
Raytheon Company- Technology Today - RF MEMS Development at...
In a small, yellow-lit clean room, an engineer patiently etches a sacrificial photoresist in an oxygen plasma.
See Raytheon Company Information
HteLabs: Bipolar, Wafer Foundry, ASIC Design, SiCr Thin Film...
Hydrophobic surface HMDS, HMDS spin coating, HMDS adhesion promoter
DfE PWB Implementation Guide
The microetch solution lightly etches the exposed copper surfaces of the panel, including the vias and barrels, to remove any chemical contamination
INDO-GERMAN WINTER ACADEMY 2005 Silicon based...
MEMS processing INTRODUCTION MICROMACHINING: Any process that deposits, etches or defines material with minimum features, measured in micrometers or
EE-650 Key Procedures for Field Oxidation
-Dip Si wafers in H2O:HF (20:1) for approximately 20-30s to remove the surface oxide formed during the previous two etches.

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