and wear problems of silicone
inflatable seals. The material, called VT606, is the first high cycle fluoroelastomer
seal material available for semiconductor applications. VT606 may also be used for custom compression
seal applications where high temperature resistance, good chemical compatibility, and/or low outgassing is required. Typical Applications. • Load Lock Door
Seals for Semiconductor Equipment. • High Vacuum Compression
Seals. • Chemical Processing Chamber
Seals. Read more...
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