Instruments For Detecting Flat Surfaces

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• MICRO:Product Technology News (Sept '99)
  , and graphically analyzed to provide a pressure profile across the complete sensing surface. The system can be used in conjunction with single- or multispindle heads. Applications include balancing pressure distribution during CMP machine setup, aligning polishing heads, detecting and measuring...
• MICRO:Industry News:'Round the Circuit (Jan '99)
  says. The long-range goal is to enable high-volume, high-yield production of advanced microcircuits. Sematech is providing partial funding for the project, which the partners hope will determine the best method for detecting and characterizing defects associated with high-aspect-ratio vias...
• MICRO: Defect Analysis
  ICP-MS (HR-ICP-MS) can overcome this interference resolution problem. Capable of detecting a range of elements, HR-ICP-MS not only offers low detection limits and a high degree of accuracy, it is less expensive than other surface techniques and can determine cleaning process efficiencies, chamber...
• MICRO: Product Technology News (September 2000)
  comparable to that of pumps for 200-mm processes. They offer high pumping speeds, quiet operation, ease of control, and low cost of ownership for the difficult etch, PECVD, and LPCVD processes used in silicon wafer and flat-panel display manufacturing. Two systems added to the NSX series perform...
• MICRO:Top 40 Product Allstars page 2 (Nov/Dec '98)
  The Microclean 960 series systems are suitable for cleaning 300-mm wafers and other large substrates, including flat-panel displays up to 1000 x 1000 mm. The tools come in a megasonic configuration using a high operating fre- quency that causes liquid to oscillate close to the substrate surface. This level...
• MICRO:Building Copperopolis, by Hugh Li, p.35 (March '99)
  . In the TRIFT II instrument, an energy-focusing, triple electrostatic array accomplishes these tasks. Although TOF-SIMS is highly sensitive for detecting both atomic and molecular species, its major disadvantage is that the resulting data are not absolutely quantitative unless standard materials...
• A Close-up Look at White-Speck Neps in Cotton
  on solutions. Some will involve improving conditions in the field. Others will be directed toward detecting immature white-speck neps before they reach the dye bath. For example, since the clumps of undyeable flat fibers reflect light differently from mature cotton, Goynes says there may be a way to use...
• Infrared Temperature Calibration 101 (.pdf)
  instrument. or standard, for the purpose. of detecting and reporting,. Wavelength. or eliminating by adjustment,. errors in the instrument tested. An IR temperature calibra-. tion starts with a measurement. surface that acts as a tempera-. ture source, which may be a. flat plate or cavity that func...
• 3D Orientation Microscopy (.pdf)
  structure in. and parallel surfaces and correctly re-. based on fully automated serial section-. a steel sample showing a 3D data cube recon-. detecting and aligning the observation. ing and EBSD based orientation micro-. structed from EBSD scans on serial sections. area. Also, these serial...
• How to Choose the Right Sensor for Your Measurement System
  . These flat resistors are usually attached to a surface that is expected to flex or bend. One use case for resistive strain gages is structural testing of airplane wings. Strain gages can measure very small twists, bends, and pulls on surfaces. When more than one resistive strain gage is wired together...

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