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Interferometric Metrology System

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Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
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  • Improved Interferometric Optical Testing
    that are broadening the applications of interferometric metrology: a new technique for reducing the sensitivity of interferometry to vibration; an interferometric method for measuring deformations and vibrations of diffuse surfaces; and a method for reducing the sensitivity to vibration and coherent...
  • Advances in Interferometric Metrology
    in Interferometric Metrology. James C. Wyant. Optical Sciences Center, University of Arizona, Tucson, AZ 85721. jcwyant@optics.arizona.edu, http://www.optics.arizona.edu/jcwyant. ABSTRACT. Modern electronics, computers, and software have made interferometry an extremely powerful tool in many fields...
  • MICRO: Using an in-line measurement system for copper damascene process control
    of the stack sublayer topography and provides data on only the layer of interest. Surface Profiling. The measurement system's SP capability is based on classical and well-characterized interferometric technologies. To initiate the process, the tool's short-wavelength laser beam is split into orthogonal...
  • MICRO:Archive:Back Issue TOC
    control system, flat-panel monitors, static-dissipative linear slides, temperature probes, in-line batch sputtering system, liquid-level sensors, wafer dryer, surface-measurement sensor, interferometric camera, copper-cleaning products, pressure transducer. Product Extra!. Return to the top...
  • MICRO:Product Technology News (Oct '99)
    proprietary interferometric technology results in the subnanometer resolution of measurements. (Semicon Southwest, Booth 710) Vacuum Pump Busch Semiconductor Vacuum Group San Jose, CA The Cobra DS-80, a 46-cu ft/min dry-screw vacuum pump, occupies minimum space in the subfab, reducing...
  • MICRO: Special Apps
    division, then Sofie Instruments, launched a twin-spot interferometric camera, which resolved the main issue encountered with a single-spot laser system: the impossibility of getting a spot to straddle a deep trench wall, be reflected at the top and bottom of the trench, and then recombine to form a clean...
  • Measuring Surface Slope Error on Precision Aspheres (.pdf)
    optics example ­ Interferometric reference mirror for NGST testing. A 0.5 meter diameter mirror was recently finished to better than 0.125 waves peak to valley at 632.8 nm over the 495.3. mm clear aperture. In addition to the surface figure requirement, the mirror has a slope requirement expressed...
  • MICRO:Product Technology News (April '99)
    in telecommunications and sensing applications. The laser's single-dimension unstable resonator results in a spatial coherence of 1.5 mm, beam homogeneity, and long-term stability. The FBG-LN line-narrowed version, offering a temporal coherence length exceeding 1 cm, is designed for the interferometric writing...
  • Optical Shop Testing
    to Interferometric Optical Testing... by Eric P. Goodwin 5.0 out of 5 stars (1) $39.00. Next. Editorial Reviews. Review. "This book is a major text in the field, and a must-read for academicians and engineers alike." (Computing Reviews, May 1, 2008). From the Back Cover. This updated Third Edition...
  • MICRO: Round the Ole Circuit
    phase-shift metrology system for advanced photomasks. The NSF Award Abstract states that "the goal of this Phase II program is to integrate the actinic high-repetition-rate laser built in Phase I into an interferometric laser microscope involving the design, construction, and integration of a stable...

Engineering Web Search: Interferometric Metrology System Top

Interferometry - Wikipedia, the free encyclopedia
Figure 2. An idealized interferometric determination of wavelength obtained by looking at interference fringes between two coherent beams recombined
Speed of light - Wikipedia, the free encyclopedia
In 1983, the metre was redefined in the International System of Units (SI) as the distance travelled by light in vacuum in 1?299,792,458 of a second.
New Frontiers in Stellar Interferometry - SPIE Astronomical...
Use of two deformable mirrors AO system for an interferometric testbed MSTAR: an absolute metrology system with submicrometer accuracy
Smart Structures and Materials 2004: Smart Sensor Technology...
Interferometric sensor and calibration system for high-precision applications Dynamic demodulation of long-gauge interferometric strain sensors
NPFLEX - Optical Interferometric Profilers: Bruker AXS
NPFLEX 3D Metrology System NPFLEX 3D Surface Metrology System
Nanometer-accurate Grating Fabrication with Scanning Beam...
Massachusetts Institute of Technology, Cambridge, MA 02139, USA ABSTRACT We are developing a Scanning Beam Interference Lithography (SBIL) system.
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ZMI Primer rev B
Better Metrology.TM Outline ? DMI introduction ? Homodyne v.s. Heterodyne ? System components & configurations ? System error sources ? DMI
NT9080 Surface Metrology System | More Information
Optical Interferometric Profilers Optical Interferometric Systems Metrology & Instrumentation Atomic Force Microscopes
See Bruker Nano Surfaces Division Information
MPE : Projects
ALFA is the "adaptive optics with a laser for astronomy" system for the Calar Alto 3.5-m telescope.

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