Iron Oxide Particulates

Conduct Research

• Comparing the characteristics of surface-passivated and electropolished 316L stainless steel
  , AISI 316L stainless steel has an intrinsic corrosion resistance because of its ability to form a protective oxide or "passive" layer on its surface by alloying >12% chromium with iron, nickel, and molybdenum. This protective layer is thought to consist of a heterogeneous chromium oxide film (Cr...
• New battery manufacturing processes at UofM Dearborn reduce time, expense using 100HE plasma torch
  Pravansu Mohanty, associate professor of mechanical engineering at University of Michigan - Dearborn, has developed a new approach for direct deposition of phosphate and oxide compounds used in Lithium-ion batteries. New battery manufacturing processes reduce time, expense using 100HE plasma torch...
• Metal-Matrix Composites
  the matrix properties of superalloys, titanium, copper, magnesium, or iron. Like all composites, aluminum-matrix composites are not a single material but a family of materials whose stiffness, strength, density, and thermal and electrical properties can be tailored. The matrix alloy, the reinforcement...
• Evaluating reusable HDPE containers for delivery of high-purity hydrofluoric acid
  for chemicals used in such critical cleaning operations as the RCA process and processes using solutions of hydrofluoric acid. Metallic impurities can adversely affect oxide integrity, reduce minority carrier lifetimes, provide nucleation sites for stacking faults during film growth, and cause surface...
• MICRO: Process Equipment Control - Richardson (April 2000)
  The control of both metallic and particulate contamination during wafer processing has become increasingly critical as device geometries have continued to shrink. Minimizing contaminant levels in high-density polysilicon etch chambers is particularly important because the gate oxide is exposed...
• MICRO: Product Technology News (July '2000)
  . The wet-bench first stage of the process is performed on a dedicated copper line to prevent cross-contamination. Stripping of individual wafers is then repeated with continuously supplied fresh chemicals and deionized water in a Class 10 area of the fab. This process enhances gate oxide integrity...
• Treating wastewater from CMP using ultrafiltration
  in Figure 1, silica particles in an oxide slurry can range in size from 20 to 80 nm, far too small to be retained by microfilters alone. To be effective, cross-flow microfilters need to build up a dynamic layer, similar to a filter precoat. Achieving this buildup frequently requires the addition...
• MICRO: Surface Conditioning/Chemistries - Song (January 2001)
  with a gate oxide of <40 A. In addition, the oxidation reaction that occurs between the etch residue and the oxidizer gas in the plasma chamber during dry ashing creates residue that is difficult to remove in subsequent wet cleans. Traditional wet cleaning processes rely on a mixture of sulfuric...
• Defect prevention and elimination: Where the rubber hits the road(map)
  to achieve surface concentrations that will not effect gate oxide breakdown. As much as possible these DPE technology requirements are based on the known failure or yield-impact mechanisms dictated by other areas of the roadmap. Many of these requirements are not validated, and therein lies the most...
• Quality Test of Rice Hull Ash Filter Aids (.pdf)
  on type and shapes. of DE deposits, and contamination by clay, sand, iron oxides, etc (Kruining, 1988). As an. 1. alternative, Rice Hull Ash (RHA), a porous silica material (Figure 1) produced from. renewable biomaterials is very similar to some forms of DE filter aid products, and. possesses...

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