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...contaminants. Spectrometers, gas analyzers, Langmuir probes, and RF power meters are employed for process gas or plasma diagnostics....

...and Langmuir probe analyzers for characterization of process and surface interactions. The plasma cell is closely coupled with the manufacturer's EQP and ESP plasma probes to provide detailed analyses such as energy-resolved mass spectra and mass-resolved energy distributions of positive and negative ions... on the or-. high-voltage is applied to the inner electrode by discharg-. der of an Alfv´en transit time. Additionally, a triple Langmuir. ing a 120 µF capacitor bank through an ignitron; the outer. probe is utilized to measure localized values of ne, Te, and. electrode is maintained at vacuum chamber...

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