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  • Utilizing Laser Technology in Dimensional Metrology Applications
    The wavelength of light provides a very high resolution, linear, and stable reference for dimensional measurement. Labmaster (R) instruments effectively couple the wavelength of light to the part to be measured. They do this by using a fringe counting laser interferometer1 to detect linear motion
  • Laser Trackers: Defining Accuracy (.pdf)
    accuracy. This white paper is intended to inform the reader of the meaning of accuracy in the context of metrology in general and in particular for the use of a laser tracker instrument.
  • MICRO: Defect/Yield Analysis & Metrology
    are especially valuable for CMP process development and control. The optoacoustic technique generates and detects ultrasonic waves using laser light, and, in contrast to profilometry, which measures surface topography, it measures metal thickness directly. For CMP applications, commercially available
  • Optical Metrology for Large Telescope Optics
    In recent years the demand for meter-scale optical elements has increased significantly, driven by growth in terrestrial and satellite-based astronomy, and defense and security applications. Laser interferometry is used throughout the manufacturing of large optics to ensure conformance to demanding
  • Infrared Wire Grid Polarizers -Metrology and Modeling
    the SWIR to LWIR using a combination of FTIR and dispersive spectrometers, as well as laser-based light sources. The WGP structures were analyzed using SEM, FIB, and STEM techniques and optical data was derived from IR VASE, transmission, and reflectance measurements. Modeling of device performance
  • MICRO: Defect Analysis and Metrology - Ge (Feb 2000)
    used laser scattering defect inspection tools provide a wealth of information about defect size and defect distribution at very high throughput. However, such optical systems sometimes fail to provide accurate defect sizes and correct defect types because of the fundamentally limited nature
  • Interferometric 3D tracking of several particles in a scanning laser focus
    High-Speed tracking of several particles allows measuring dynamic long-range interactions relevant to biotechnology and colloidal physics. In this paper we extend the successful technique of 3D back-focal plane interferometry to oscillating laser beams and show that two or more particles can
  • MICRO: Defect/Yield Analysis and Metrology - Collins (June 2000)
    layer in transparent multilayer film stacks on product wafers. However, there was no comparable metrology system for the analysis of opaque multilayer metal (MLM) film stacks (as depicted in Figure 1) until 1997, when Rudolph Technologies (Flanders, NJ) introduced picosecond ultrasonic laser sonar

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