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  • Micro moves
    actuators create ultrasonic vibrations in a tube, which makes a threaded nut at the end of the tube vibrate in an orbital fashion. The nut threads onto a screw shaft, translating the orbital motion into linear motion of the screw. Drive signals 90 out of phase with each other drive two sets
  • Novel Piezo Motor Enables Positive Displacement Microfluidic Pump
    We present the world's smallest linear motor and its use in tiny syringe and reciprocating piston pumps for microfluidic applications. SQUIGGLE (R) motors create direct displacement pumps that achieve nanoliter precision in a pump assembly the size of a pen cap. In this design, linear motion
  • MICRO: Product Tech News
    of costly cluster-tool robots. The unit loads wafers or other flat substrates from a cassette into SEMI-standard or custom process modules. Exterior motors power the magnetically coupled elevator system and linear guide mechanism, allowing substrates to be loaded and removed repeatedly without breaking
  • MICRO:Archive:Back Issue TOC
    slurry cleaning systems, particle detection system, silicon-on-quartz wafers, yield management software, linear motion guide, flame detector, brushless linear motors, Teflon bellows, rapid thermal processing tool, poly etch system, critical dimension SEMs, flow switches, web-enabled tool connectivity
  • MICRO:Product Technology News (June '99)
    The Titan robotic platform is designed to meet the reliability, repeatability, and durability needs of advanced IC manufacturing in 200- and 300-mm fabs. Features include brushless motors that eliminate failure and maintenance modes, backbone frame, and linear bearing assembly for high accuracy
  • Medical Device Link .
    direct-drive Micro Linear motors, which reportedly achieve fast throughput and high reliability in a low-cost package. Their design is very simple. It consists of two basic parts, the thrust rod and the forcer. The thrust rod contains high-intensity permanent magnets. The load-carrying forcer

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