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  • MICRO: Product Extra!
    with a single-vacuum 25-wafer cassette, offering a low-cost clustered processing system while maintaining high handling accuracy and wafer-transport integrity. The system uses the Brooks Automation Marathon Express MX400 automation platform. It features the Brooks
  • MICRO:Product Technology News (Sept. '98 p.60)
    . Featuring advanced automation capability, the implanters are designed to meet the need for increased yields and reduced die costs. The oil-free, piston-operated EcoDry L pump minimizes hydrocarbon contamination. The pump incorporates permanently lubricated and sealed bearings placed outside the vacuum
  • MICRO: Controlling particles in sputter deposition modules
    failure remains a critical concern of the semiconductor industry. Achieving low defect densities at all process steps is essential to both ensuring high product yields and minimizing manufacturing costs. Because many of today's devices require numerous layers of interconnects, the physical vapor
  • MICRO: Product Tech News
    , the i3MicroClean system cleans small, delicate surfaces faster than traditional methods and does not cause abrasion or disassembly. The cost-effective, quiet system consumes low volumes of air and ice. Ergonomic and easy to handle, it uses recycled CO , which reduces or eliminates the use

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