Low Outgassing Base Material

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• Expanded PTFE Polymer Keeps Electrical and Electronics Cables Clean and Flexible
  Expanded PTFE keeps cables flexible * Expanding PTFE lets engineers tailor its form and properties. * ePTFE in cable insulators, binders, and jackets can prolong flex life. * The cables' low particulation and outgassing makes them good for clean-room environments. W. L. Gore and Associates...
• Plastics for plasma etching
  , and availability. The importance of ionic impurity and low outgassing also make materials that include Ketron XP PEEK (from Quadrant Engineering Plastic Products), Torlon (BP Amoco Performance Products Inc.), and Celazole PBI (Celanese Acetate Inc.) excellent candidates. Ceramics are also materials of choice...
• Lubricants For Semiconductor Manufacturing Equipment
  for low-outgassing are base oils with high molecular weights, materials such as MACs, PPEs, and PFPEs. Further, because each molecule in a base oil can have a slightly different molecular weight, narrowing the range of molecular weights is better still. A special distillation process can remove lighter materials...
• MICRO:Product Technology News (Oct. '98, p.110)
  and a pressure-relief valve. Clamped to the base with a large O-ring, the chamber has two quick-disconnect fittings for filling and purging. The chamber is made of low-outgassing transparent molded poly- urethane which blocks UV light at a rate of 2% below 250 nm. The filter in the nitrogen input line is rated...
• MICRO: Product Technology News
  algorithms that provide the ability to monitor, develop, and control organic low-k and ultralow-k interlevel dielectric materials. Diagnostic, Monitoring Software. Cymer. San Diego. CA. Lithography light source specific software provides remote analysis and support of the company's installed base...
• MICRO:Product Technology News (Feb 99)
  usefully predictable and directional. Application of a low voltage of <100 V dc enables easy control. Metal bellows allow free travel of the actuator as it prevents degradation and outgassing of the actuator mechanism. This feature permits immersion of the actuator in fluid or use in high-vacuum...
• Defect prevention and elimination: Where the rubber hits the road(map)
  processes. Seal technology and low-outgassing, nonadsorbing materials must continue to evolve. The third and fourth phases will likely make use of pods with inert environments to transport and store wafers. Pregate and precontact cleans and salicidation are cited as processes that will first...
• MICRO:Product Technology News (March 2001)
  , making it more cost-effective and efficient than traditional valve manifolds made of heavy metal or plastic. Tolerance problems and potential leak points are minimized by an elastomer base for screwless assembly and fewer functional parts. Compact Process Controller. Watlow Electric Manufacturing. St...
• Lubricants for Semiconductor Manufacturing Equipment (.pdf)
  base oils. with low vapor pressure and high. molecular weight, particulate con-. tamination control is another impor-. tant criterion for lubricants in vacu-. um and clean room applications. During manufacture of the lubricant,. dust, dirt, and even improperly dis-. persed thickeners can become...
• Specialty Motors for Corrosive Environments
  provide shaft positioning resolution of 25,000 increments per revolution of the motor shaft with a feedback resolution of up to 16,384 increments per revolution. To reduce outgassing at low temperature, insulation materials were made of selected polymers. Magnet and lead wire materials were carefully...

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