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  • MICRO: Ultrapure Gas Delivery - Morgan (September 2000)
    by the process recipe. These subsystems generally consist of several automatic shutoff valves, a pressure regulator, and a mass-flow controller (MFC). A gas stick receives its supply from a "gas room, " which contains the various high-pressure process gases used throughout the facility. These gases
  • MICRO:Top 40 - Page 2 (Nov '00)
    A high-flow 3-in. NPT relief valve for corrosive and ultrapure liquids also serves as a back-pressure regulator and bypass valve. The Series RVTX angle-pattern valve is made of Grade 1, Type 1 PVC and comes with a choice of Viton or EPDM elastomeric seal. It can be customized or made of other
  • U.S. Patents | February 2007 | A B T | 7MS.com
    Fiber Corp. U.S. 7,144,644 (20061205), Mass flow metering air supply for a solid-oxide fuel cell stack, Karl J. Haltiner Jr. and Sean M. Kelly, Delphi Technologies, Inc. U.S. 7,144,645 (20061205), Operation method for polymer electrolyte fuel cell, Kazuhito Hatoh, Osamu Sakai, Hideo Ohara, Junji

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