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  • MICRO: Ultrapure Gas Delivery - Morgan (September 2000)
    by the process recipe. These subsystems generally consist of several automatic shutoff valves, a pressure regulator, and a mass-flow controller (MFC). A gas stick receives its supply from a "gas room, " which contains the various high-pressure process gases used throughout the facility. These gases
  • Evaluating the use of MEMS-based gas and fluid delivery systems
    and electromechanical counterparts. With recent MEMS innovations, the list of conventional gas and liquid control components that can be replaced with smaller, MEMS-based equivalents includes mass-flow controllers (MFCs), pressure regulators, and positive shutoff valves. It is now possible to replace
  • Using an in-line monitor to obtain real-time moisture measurements (First of two parts)
    of moisture-related electrical damage is steadily increasing as linewidths continue to shrink below 0.5 um and more process steps are required. In addition, in corrosive and reactive gases, moisture contamination can severely damage gas lines and related components (e.g., mass-flow controllers, valves
  • MICRO:Top 40 - Page 2 (Nov '00)
    A high-flow 3-in. NPT relief valve for corrosive and ultrapure liquids also serves as a back-pressure regulator and bypass valve. The Series RVTX angle-pattern valve is made of Grade 1, Type 1 PVC and comes with a choice of Viton or EPDM elastomeric seal. It can be customized or made of other
  • U.S. Patents | February 2007 | A B T | 7MS.com
    for controlling a gas, Guenther Bantleon and Thanh-Hung Nguyen-Schaefer, Robert Bosch GmbH (DE). U.S. 7,144,445 (20061205), Use of an adsorbent in solid foam form for the purification or separation of gases, Vincent Gueret and Serge Moreau, L 'Air Liquide, Societe Anonyme a Directoire et Conseil de Surveillance

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