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MICRO: MEMS Lithography
sagging, introducing across-wafer magnification errors. While 1x step-and-repeat technology is evolving continuously, projection aligners have long since ceased to develop. Steppers have added state-of-the art laser-interferometer stages; fully automated off- and on-axis, through-the-lens alignment...
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Seeing In Nanometers: Laser And Gratings Make Tiny Motions Visible To Human Eye
, an independent consultant who once headed up Advanced Technologies at Tellium Inc., and the MEMS Network Element. Seeing In Nanometers: Laser And Gratings Make Tiny Motions Visible To Human Eye | Machine Design. Skip to Content. Home. Subscribe. Advertise. Contact. RSS. E-mail: * Password: *. Create new...
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Wired 8.01: As the MEMS Revolution Takes Off, Small Is Getting Bigger Every Day
with kinetic, three-dimensional gizmos: laboratories, laser-guided mirrors, canals flowing with chemicals. An offshoot of the semiconductor industry, MEMS benefit from the well-known peculiarities of the silicon universe - every year chips get tinier, cheaper, and faster. If proponents are correct...
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Shedding New Light On Tiny Packages
Welds 0.1 mm wide? No problem. Recent laser transmission welders join plastic components with unprecedented precision. These micrographs show seams made with the mask welding procedure. The gray shaded area is welded. A MEMS silicon mass flow sensor contains a highly sensitive thermal anemometer...
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Ultra-thin mirror for high-performance optics
a UC Berkeley professor of electrical engineering and computer sciences. Super-thin mirrors could dramatically improve the design and efficiency of next-generation laser-optic-based devices. Inside high-definition DVD players, computer circuits, and laser printers, for example, a pair of mirrors...
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Hot topic at MD&M West: Nanomaterials
, and Laser Tec are special-focus pavilions. Technical sessions will cover topics that include the use of nanomaterials in the health-care and medical-device industries. A conference, "Nanoadditives in Composites and Coatings for Medical Device Applications" (Session 102) on Feb. 12, from 9 a.m. to 4 p.m....
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MICRO: Products
that have more than one cassette or an additional thin-film inspection module sharing the same robot. Based on an optical design using a blue laser diode, the compact system outputs a full 2-D color map of the wafer surface in minutes, showing not only the distribution but also the sizes of defects...
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Coarse and fine combined
motor/drive systems can operate open-loop or closed-loop with a high-resolution encoder or laser interferometer. Clearly there are a host of mechanical bearing and encoder issues that also impact the ability to position equipment at the nanometer or subnanometer level. For example, the stiffness...
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Coming Soon To Circuit Boards: The electronic potentiometer
and integrated circuits. Typically, circuit setup and calibration takes place by adjusting a resistance element using a variety of trimming techniques. These include manual mechanical potentiometers, laser trimming, fuseable passive-resistor arrays, and electrically configurable resistor arrays...
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Using microtechnology to get to nanotechnology
in response to stimuli and that deflection is detected by bouncing a laser off the beam and noting changes in the reflected laser. In a dynamic AFM, the cantilever is vibrated at its resonance frequency. The frequency characteristics change in response to stimuli, letting researchers determine...