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MEMS Metrology Equipment
-related products, suppliers, datasheets and CAD.|
Product Announcements
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SemiProbe 
Hiden Analytical 
MTI Instruments Inc. 
MTI Instruments Inc.
Sulzer Metco (U.S.), Inc.
Rigaku Corporation |
Products/Services for MEMS Metrology Equipment
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MEMS Processing Equipment - (44 companies)MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers. MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers. MEMS processing equipment includes... Search by Specification | Learn More -
No Image AvailableMEMS Devices - (28 companies)...devices on a contract basis, in amounts ranging from prototype to production quantities. Typically, these companies use MEMS processing equipment such as silicon etching tools, wafer grinders, lapping and polishing machinery, and planarization equipment... Learn More
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Semiconductor Metrology Instruments - (179 companies)Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers... Search by Specification | Learn More -
Surface Metrology Equipment - (300 companies)Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects. How to Select Surface... Search by Specification | Learn More -
Lithography Equipment - (64 companies)Lithography equipment transfers circuit or device patterns onto a substrate using a patterned mask and a beam of light or electrons to selectively expose a photoresist layer. Overlay metrology systems align the pattern masks or reticules... Learn More -
Thin Film Equipment - (309 companies)Thin film equipment uses vacuum processing for the modification of surfaces using CVD, PVD, plasma etching, and thermal oxidation or ion implantation. Thin film equipment is vacuum process equipment for the deposition or modification of thin films... Search by Specification | Learn More
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Semiconductor Equipment Repair Services - (40 companies)Semiconductor equipment repair services repair, rebuild and refurbish equipment related to the manufacture and processing of semiconductors. Semiconductor equipment repair services repair, rebuild and refurbish equipment related to the manufacture... Learn More
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Wafer and Thin Film Instrumentation - (347 companies)Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film... Search by Specification | Learn More
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Surface Profilometers - (190 companies)Surface profilometers are contact or non-contact instruments used to measures surface profiles, roughness, waviness and other finish parameters. Search by Specification | Learn More
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Form Gages and Form Gaging Systems - (85 companies)...of accuracy as form metrology equipment. Straightness places all of the points of an edge or feature within a single line. It can be measured using either the minimum zone method or least-squares method. Some form gages and form gaging systems can... Search by Specification | Learn More
Product News for MEMS Metrology Equipment
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Metal Cutting Corporation
Cleanroom MetrologyOur cleanroom houses an array of custom designed system integrated metrology devices. Our cleanroom facility contains LVDT fulcrum beam measuring systems for high volume measuring of micron tolerances, twin sequential camera vision systems using parallel computer processors for defect identification and dual laser PLC full circumference parallelism and concentricity inspection. Throughout our factory are multi-stage ultrasonic cleaning stations, multiple dimensional diverging graders, single... (read more) -
Lapmaster International
Lapmaster FTP 130 for MetrologyLapmaster International LLC presents the FTP 130 as a new product addition to its Metrology Line. The FTP 130 is a 3 way measuring system which accurately measures the flatness, thickness and parellelism of both 1 and 2 sided parts. Up to two different functions can be used simultaneously to measure parts as thin as 0.20mm or as thick as 200mm. It also comes with a new analog-digital display that elimates the possibility of any inaccuracies. This unit provides a very cost effective, compact... (read more) -
MTI Instruments Inc.
Wafer Metrology Measurement ToolThe Proforma 300SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 200 mm and 300mm wafers, the 300SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around MTI Instruments' exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning at the press of a button. User defined and ASTM/SEMI scan patterns are used to... (read more) -
Rigaku Corporation
TXRF 3760 Surface contamination metrologyMEMS, organic electroluminescent materials, etc. bare wafer. filmed wafer. patterned wafer. VPD-processed wafer. glass wafer. GaAs / SiC / sapphire... (read more) -
MSI-Viking Gage
Outsource All Your Metrology NeedsMSI-Viking Gage can customize and administer a Total Solution Program to manage the calibration, maintenance and inventory control of all your company's metrology equipment. Fully Customized Total Solution Programs. There is no charge to you for us to meet with you, evaluate your needs and develop a program to meet your company's very specific requirements and wishes. Your Total Solution Program can include any combination of these services tailored to your business: Regularly scheduled... (read more) -
MEDER electronic, Inc.
Magnetically Operated MEMS SensorsOur MMS series MEMS Reed Sensor offers new solutions to many MEMS applications, especially those with low power requirements, including human implantable devices. The hermetically sealed MMS sensor needs no external circuitry for switching and can perform >100 million reliable operations while it draws zero power in the off state. Features: >100 million reliable operations. Draws zero power in the off state. Hermetically sealed. Human implantable. Needs no external circuitry. Simple... (read more) -
Mahr Federal Inc.
MarSurf™ WS 1 Optical Surface Metrology SystemMahr Federal has expanded its offerings in the world of optical surface metrology with the introduction of the MarSurf ™ WS 1. Utilizing white light interferometry in a compact design, the MarSurf WS 1 offers vertical resolution of 0.1 nm (.004 µin) and provides three-dimensional measurement in only a few seconds. Utilizing MarSurf XT 20 topographical evaluation software, the space-saving MarSurf WS 1 can be configured to work both in the lab and on the shop floor. With the new processes... (read more) -
Rogue Valley Microdevices, Inc.
MEMS Foundry - Custom Device DesignSpecializing in MEMS and Biomedical Device fabrication, Rogue Valley Microdevices is a full service MEMS foundry that combines state of the art process modules with the engineering experience and expertise to seamlessly go from custom design to device manufacturing. Our MEMS Foundry eliminates the need for customers to use multiple suppliers. All front end processing is performed in house and under the supervision of our experienced process engineering team. Maintaining all MEMS process... (read more) -
Silicon Designs, Inc.
Universal MEMS Capacitive Accel ModulesSilicon Designs, Inc. (www.SiliconDesigns.com), a global industry supplier of highly rugged industrial-grade MEMS capacitive accelerometer chips and modules with integral amplification, has announced the global market introduction of its 60 Series, a new family of universal MEMS capacitive accelerometer modules. Available in eight different models and in both single axis and triaxial versions, the Silicon Designs 60 Series features measurement ranges from 2 g to 400 g. These rugged, lower cost... (read more) -
Silicon Designs, Inc.
Low Cost MEMS Capacitive AccelerometerThe model 1210 accelerometer from Silicon Designs, Inc. (www.silicondesigns.com) is a low-cost, integrated accelerometer for use in zero-to-medium frequency instrumentation applications. It combines in a single, miniature, hermetically sealed package, a MEMS capacitive sensing element and a custom integrated circuit that includes a sensing amplifier and differential output stages. Features: Capacitive MEMS sensing element. Nitrogen Damped & Hermetically Sealed. ±4 V Differential Output... (read more)
Conduct Research
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MICRO: Special Apps
is communication and cooperation between IC equipment vendors and MEMS tool owners. This article describes how an optical metrology tool that was originally designed to measure critical dimensions (CDs) and pattern alignment in semiconductor devices was adapted to the unique requirements of ink-jet MEMS...
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MICRO: Archive: Back Issue TOC
DRAM contact defects in real time. PRODUCT TECHNOLOGY NEWS. Products: MEMS etch/deposition tools, gas-line heater system, supercritical CO2 chamber, trench measurement tool, integrated metrology platform, control technology, transfer station, 300-mm copper electroplating tool, pressure transducer...
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MICRO: Archive: Back Issue TOC
ARTICLES. Special Apps: Advancing real-time DRIE silicon trench etch-depth monitoring in MEMS applications. Materials Integration: Using an ICP-based strip system to perform resist and barrier-layer removal in copper low-k processes. APC/AEC: Eliminating scrap through process and equipment control...
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MICRO: Prod Tech news
The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization...
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MICRO: Semicon West 2004
run in S.F., and a series of daily keynote speeches by such luminaries as Micron's Steve Appleton, TSMC's F. C. Tseng, and Intel's Paolo Gargini. The SEMI Technology Symposium (STS) boasts a full complement of conferences on strained silicon, in situ metrology, MEMS, interconnect, and other key...
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MICRO: World Beat
processes, Silterra says. Installed equipment will include FSG deposition tools, high-energy implanters, etchers, a DUV scanner, and metrology tools. The systems will increase the plant's monthly capacity by 4000 wafers to 22,000 wafers. The 0.13-um systems include low-energy ion implanters...
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MICRO: Semicon Europa 2003
a special exhibit in Hall A2 focused on microelectromechanical systems, the MEMS Manufacturing Technologies Platform, which showcases a select group of companies supplying equipment, materials, and components to the fast-growing micromachine and microsystems market. In addition to the platform...
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MICRO:Archives of 1998 Issues
MEMS contamination questions starting to yield some answers Firesafe plastics for fab environments scrutinized; Lucent, Emcore team to develop new thin films; CMP wastewater reclaim system debuts; Balazs Lab installs Atomika metrology tools; ESD standards published Applied buys Consilium in stock...
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MICRO: Products
for accurate layer-to-layer registration and autofocus measurement and compensation. Metrology sensors used to calibrate and optimize the system perform transmission alignment, modulation transfer, illumination intensity, and reflective alignment functions. A system for cleaning front-opening unified...
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MICRO: 'Round the Circuit
SPS)--will work with CEA's Electronics and Information Technologies Laboratory (LETI) at the recently inaugurated Nanotec 300 fab in Grenoble, France. The new research facility includes 1000 sq m of cleanroom and a suite of 300-mm fabrication and metrology equipment. The research will focus on four...
Engineering Web Search: MEMS Metrology Equipment
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Exhibition | Photonics West | SPIE - MOEMS-MEMS - OPTO - GREEN PHOTONICS Fiber optic components, equipment, systems |
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[No Title] Veeco Certified Equipment A - Z Product Directory See Veeco Instruments, Inc. Information |
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High Quality Used, Surplus, and Refurbished Semiconductor... Metrology Equipment Defect Inspection Microscopes ClassOne Equipment | Process Equipment See ClassOne Equipment, Inc. Information |
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ClassOne Equipment Experiences Significant Growth in... Metrology Equipment Defect Inspection Microscopes ClassOne Equipment Experiences Significant Growth in Refurbished Equipment Market See ClassOne Equipment, Inc. Information |
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Used Semiconductor and Scientific Equipment for Science and... CBI has been buying and selling equipment used in the manufacturing of Semiconductor, Optoelectronic, MEMs and Nanotechnology products since 1987. See Capovani Brothers Inc. Information |
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MEMS Equipment - Fraunhofer Institute for Photonic... Main page > Services and Core Competencies > MEMS Technologies > MEMS Equipment MEMS-CET system | Primaxx Analytics / Metrology See Fraunhofer Institute for Photonic Microsystems Information |
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AZoM™ - The A to Z of Materials and AZojomo - The... Equipment Software Market Reports Experts Equipment Aluminium Smelting Aluminium Cast House Equipment See AZoM Information |
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4Semi - Used and Surplus Semiconductor Equipment Wafer Fabrication Equipment Chemical Mechanical Planarization Equipment ? Chemical Vapor Deposition Equipment ? Ion Beam Equipment ? Ion Implantation See 4Semi Used Semiconductor Equipment Information |
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About SEMI Standards | SEMI.ORG and semiconductor manufacturing: Equipment Automation (Hardware and Software), Facilities, Gases, MEMS/NEMS, Materials, Microlithography, Packaging, See Semiconductor Equipment and Materials International (SEMI) Information |
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Industrial Equipment Manufacturing - Hardness Tester - Digital... MEMS Services Metrology & Testing Services Industrial Equipment Hardness Tester HART?P 2000 |
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