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Detter's confidence in the rapid emergence of microsystems technology (MST) and microelectromechanical systems (MEMS) as driving forces in device design and fabrication is buttressed by a recent market analysis. A micromotor for device applications was developed and manufactured at the Institut f...

Until now, scientists couldn't accurately measure the friction that plagues miniature motors, pumps, and gears -- mechanisms that could one day move inside microscopic medical implants in the body, for example. Such devices -- microelectromechanical systems (MEMS) -- contain parts so small...

...motors, MEMS micromachining techniques are used to produce some of the motor and gearing parts, and more-traditional micromotor technologies are used to solve the assembly, lubrication, and power issues. A brushless dc motor with planetary gearhead in the 2-mm-diam range has many potential applications...

The Pro family of plasma etch and deposition tools is compatible with advanced silicon etch technology, which achieves the anisotropic deep-etched structures in silicon needed to make MEMS devices such as accelerometers; gyroscopes; precision spectrophotometer slits; and microactuator, micromotor...

...on battery power. Movement is fine-tuned and each leg is fitted with a wear-resistant sole to minimize wear. The backlash-free motor operation is suitable for micromanipulation in surgical and laboratory instruments. PiezoMotor Uppsala AB, Uppsala, Sweden. MEMS-based sensors. Liquid-flow sensors...

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