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...with implantable drug delivery systems are among the existing and potential applications that he cites. Detter's confidence in the rapid emergence of microsystems technology (MST) and microelectromechanical systems (MEMS) as driving forces in device design and fabrication is buttressed by a recent market...

The Pro family of plasma etch and deposition tools is compatible with advanced silicon etch technology, which achieves the anisotropic deep-etched structures in silicon needed to make MEMS devices such as accelerometers; gyroscopes; precision spectrophotometer slits; and microactuator, micromotor...

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