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  • Packaging microscopic machines
    (MEMS) find use in a rapidly growing number of products including inkjet print heads, implantable medical dispensers, accelerometers, and pressure sensors. Key to broader adoption of the technology is packaging A package, by this definition, is a device that protects MEMS and ICs from damage
  • MICRO: Product Extra!
    An automation platform enables multiple plasma process chambers to share a common wafer-transport system. VPX from Surface Technology Systems (STS) is used in pilot production tools that fabricate devices in fuel cells and MEMS automotive sensors. VPX services up to three STS plasma process modules

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