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  • Utilizing Nano Technology Greatly Improves Metal Oxide Sensor Performance (.pdf)
    Advanced work in chemi-resistive sensing has been in the area of nanoengineered grain structures. The Net Safety metal oxide H2S sensor, available with our next generation gas detector, the Millennium II, shows a substantial performance increase as oxide grain size is reduced to the "nano" level
  • Humidity sensors
    layer between two metal plates in capacitive sensors, while creating fluctuations in the impedance of resistive sensors. Early humidity sensors used natural materials like silk or hair as the mechanical sensing element; the material shrank when dry because of low relative humidity and expanded when
  • General Information for TGS Sensors
    The sensing material in TGS gas sensors is metal oxide, most typically SnO2. When a metal oxide crystal such as SnO2 is heated at a certain high temperature in air, oxygen is adsorbed on the crystal surface with a negative charge. Then donor electrons in the crystal surface are transferred
  • Thin-Film Sputtering Deposition Strain Sensors
    Many applications use a manufacturing process known as thin-film sputtering deposition. The typical sputtering process uses an ion beam to impact the surface of a sputter material such as gold, silver, or other metal or metallic oxide. In so doing, some of the sputter-material atoms get knocked
  • Evaluating the use of hard-mask films during bulk silicon etching
    Ken Goldman, K. Sooriakumar, Cindy Ray, and Mark Schade, Bulk-micromachined silicon pressure sensors typically consist of a diaphragm that deflects when subjected to a pressure load, a boron-implanted piezoresistive transducer that translates strain to a differential voltage, and metal pads
  • MICRO: Product Technology News (October 2000)
    . The semiaqueous residue remover EKC660 for cleaning postetch residue in sub-0.18- um semiconductor devices is offered as an alternative to hydroxylamine. Its semiaqueous chemistry cleans vias as well as metal lines without attacking metals or oxides and causing critical dimension loss. The cleaner makes
  • Hear this: CMOS microphones on a chip
    cameras. A scanning electron microscope image of the diaphragm on the Akustica microphone chip shows the serpentine pattern created in the chip's metal and oxide layers. The special structure is necessary to
  • Society for Information Display News Stories March 2001
    Semiconductive "Nanobelts " Could One-Up Nanotubes as FED Emitters Atlanta, Georgia, March 9 - Researchers have created a new type of nanometer-scale structure that could be the basis for inexpensive ultra-small sensors and flat-panel-display components. Made of semiconducting metal oxides

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  • Metal Oxide Nanomaterials for Chemical Sensors
    Research efforts to improve the performances of present metal oxide sensor technology through the variation of both surface chemistry, morphology and microstructure via combinatorial and chemically directed design and novel syn- thetic methods has begun to yield libraries of materials for use...
  • Handbook of Gas Sensor Materials
    Metal oxide sensors can become “dormant�? after several days of inactivity due to surface effects.
  • Handbook of Gas Sensor Materials
    In addition, CNT-based sensors demonstrated a faster response and a higher sensitivity than, for example, metal oxide sensors operated at room temperature (Valentini et al. 2003, 2004a, b).
  • Solid State Gas Sensing
    In the field of low-cost solid-state gas sensors, metal oxide sensors have found widespread commercial application [12, 13, 14, 15].
  • Gas Sensing Fundamentals
    Langasite-based bulk acoustic wave resonators with two different electrode layouts enable to distinguish between conductivity and mechanical effects in metal oxide sensor films.
  • Sensing Technology: Current Status and Future Trends II
    In modern e-nose systems a variety of sensors like Conductivity sensors, Con- ducting polymer composite sensors, Intrinsically conducting polymers, Metal oxide sensors ,Piezoelectricsensors,Surfaceacousticwavesensor,Quartzcrystalmicrobal- ance sensor, Optical sensors, Metal-oxide-semiconductor field-effect transistor sen- sor etc. are usually used...
  • Handbook of Machine Olfaction Complete Document
    Since metal oxide sensors gen- .
  • Solid State Gas Sensors - Industrial Application
    During the past years, many completely different sensor concepts were devel- oped, like hydrogen detection via thermal conductivity [1, 2], electrochemical cells [33] or metal oxide sensors [34].