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  • MICRO:Product Technology News (Sept '99)
    resistance varies with applied force separates conductive rows and columns in the sensor grid, making each intersection on the sensor a force sensor. The computerized system scans and measures the change in resistance at each sensing cell in order to determine the timing, force, and location
  • MICRO:Product Technology News (March '99)
    modular design combines cleanroom engineering, robotic handling, and SECS/GEM communications. A linear encoded sample stage has a resolution of 0.25 um and a pattern recognition system for automatic alignment, positioning repeatability, and high throughput. The SoftScan low-inertia sensor enables

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