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  • MICRO: Products
    . A monitoring device for chemical-mechanical planarization applications provides rapid insight into the pressures applied during the polishing process and supplies data directly to personal computers. The easy-to-use I-Scan system measures the tactile force and pressure applied by a polishing head
  • MICRO:Product Technology News (March '99)
    modular design combines cleanroom engineering, robotic handling, and SECS/GEM communications. A linear encoded sample stage has a resolution of 0.25 um and a pattern recognition system for automatic alignment, positioning repeatability, and high throughput. The SoftScan low-inertia sensor enables
  • MICRO:Product Technology News (Sept '99)
    resistance varies with applied force separates conductive rows and columns in the sensor grid, making each intersection on the sensor a force sensor. The computerized system scans and measures the change in resistance at each sensing cell in order to determine the timing, force, and location
  • Medical Device Link .
    There's a big future in small things, according to Helmut Detter, head of the department of precision mechanics at the Technical University of Vienna. As one of the coordinators of the Micro Moulding Machinery project (Wiener Neustadt, Austria), a consortium of companies and organizations
  • | Electronics Industry News for EEs & Engineering Managers
    imaging FEI Co. will unveil a family of transmission electron microscopes that it says will enable atomic-scale imaging and analysis of semiconductor wafers. Nvidia joins AMD in graphics-chip probe Joining Advanced Micro Devices Inc. (AMD) in a probe, Nvidia Corp. Friday (Dec. 1) said that it has

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