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  • MICRO:Industry News:Expansions & Acquisitions (Sept. '98, p.26)
    Client demand was the main reason that Olin Microelectronic Materials and Matheson Semi-Gas Systems signed their recent deal to combine their respective chemical and gas management services in one package. "Customers [told us] they were looking for one company to offer both gases and chemicals...
  • Vantage Point: Mechatronics in semiconductor fab automation
    Historically, the semiconductor industry has been driven by physics and chemistry. These are the disciplines that have led to perfecting manufacturing processes that, in turn, have brought remarkable advances in microelectronic technology. In semiconductor manufacturing, the focus has mainly been...
  • MICRO:Archive:Back Issue TOC
    first; FOUP sales set record; Genus sells first ALD tool Seiko Epson inks SOI pact; Partners offer software; Ibis ups wafer capacity; Brooks buys SEMY; Lambda opens service center; Semtech exiting foundry biz; Chem vendors expands to Asia SCP Global Technology, SPIE's Symposium on Microelectronic...
  • What drives defect detection technology?
    , engineers focus on solving fundamental process problems, relying primarily on in-line metrology and electrical data from microelectronic test structures. Defect inspection becomes increasingly important once VLSI circuits are introduced into the process development effort, when inspection tools detect...
  • MICRO: Rebuilding Copperopolis - Biolsi (July 2000)
    use increases. Organic contamination is the least-studied source of defects, while scratches and dielectric film stress are common process-related problems. As geometries shrink, microelectronic fabrication processes become more complex, forcing semiconductor engineers to develop strategies...
  • MICRO:Movin On (Nov/Dec '98)
    Interox. Paul Koenig has been promoted to director of logistics. Tegal has promoted Philip Wilton to European gm. He is the former director of service operations. . . . The new manager of Olin Microelectronic Materials' process chemicals plant in Mesa, AZ, is Charles Newton IV. Lindsey Hall...
  • MICRO: Expansions and Acquisitions
    , producer of high-purity analytical reagents and microelectronic chemicals, has purchased Machwolk of Petaling Jaya, Malaysia, an independent distributor of J.T. Baker and Mallinckrodt products in Malaysia. Within the next two years, Mallinckrodt Baker plans to manufacture a range of products...
  • MICRO:Movin' On (Oct. '98, p.162)
    . Tegal has promoted Philip Wilton to European gm. He is the former director of service operations. . . . The new manager of Olin Microelectronic Materials' process chemicals plant in Mesa, AZ, is Charles Newton IV. Lindsey Hall was appointed director of technology for chemicals and services...
  • MICRO: Editor's Page
    of keeping ramp-ups on track is the implementation of advanced process control (APC), an area getting increased traction at both the microlithography conference and its sister symposium on advanced microelectronic manufacturing. "At 300 mm, APC will become a must-have capability analogous to what...
  • INDUSTRY NEWS
    ramp vertical furnace systems. Eaton formed the unit after it purchased High Temperature Engineering in May 1996. The thermal business has more than tripled since its inception, Eaton says. Allied moves HQ AlliedSignal Advanced Microelectronic Materials (AMM) has moved its headquarters...

Engineering Web Search: Microelectronic Metrology System

Interferometry - Wikipedia, the free encyclopedia
In a typical system, illumination is provided by a diffuse source set at the focal plane of a collimating lens.
Comparison of optical and electrical measurement techniques...
Comparison of optical and electrical measurement techniques for CD metrology on alternating aperture phase-shifting masks
Optical system for fast inspection of hermetic seals in...
Optical system for fast inspection of hermetic seals in electronic packages
Quality Insider | Quality Digest
Metrology Six Sigma Standards Videos Metrology Six Sigma Standards Inside Quality Insider
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Product News: Nikon Metrology to Deliver Microfocus CT System...
Nikon Metrology Inc. | 09/13/2010 Bio Product News: Nikon Metrology to Deliver Microfocus CT System to Chesapeake Testing
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Ion projection lithography: status of tool and mask...
The ion optics system (PDT-IOS) includes in situ metrology systems.
Metrology Tools measure thin transparent films., Rudolph...
Overlay Metrology System suits memory and logic devices. Metrology System measures surface and contour in single pass.
I SYSTEMS, Inc. - Microelectronic Inspection Systems (SMD,...
Semiconductor Inspection and Marking SMT & Hybrid Inspection 3D Metrology/Inspection (Solder Paste, Epoxy, BGA) AVM Series Automated Dimensional
See I Systems, Inc. Information
DNA Microarrays (Genome Chips) (by Leming Shi, PhD)
Microarrays require specialized robotics and imaging equipment that generally are not commercially available as a complete system.
Rudolph : Rudolph Announces New MetaPULSE-G Copper Film...
Home   |   News and Events   |   Rudolph Announces New MetaPULSE-G Copper Film Metrology System
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