Microelectronic Monitoring Equipment

Conduct Research

• Case Study: Sensors for Conditioning Monitoring High Voltage Switching
  Conditioning monitoring on high voltage switchgear for the supply of mains electricity is an important function for preventative maintenance to ensure continuity of supply to consumers. The high voltage switchgear at major power distribution facilities operates in a very harsh environment with very...
• MICRO:Defect Inspection Equipment, by Thomas Reuter (Oct '99)
  setup was emphasized, which enabled the tool's subsequent trouble-free integration into the production flow as part of an in-line defect-monitoring strategy. When performing investigations of memory product, emphasis was placed on detecting metal shorts in both the array and the periphery regions...
• MICRO:Industry News:Expansions & Acquisitions (Sept. '98, p.26)
  Client demand was the main reason that Olin Microelectronic Materials and Matheson Semi-Gas Systems signed their recent deal to combine their respective chemical and gas management services in one package. "Customers [told us] they were looking for one company to offer both gases and chemicals...
• MICRO:Archive:Back Issue TOC
  first; FOUP sales set record; Genus sells first ALD tool Seiko Epson inks SOI pact; Partners offer software; Ibis ups wafer capacity; Brooks buys SEMY; Lambda opens service center; Semtech exiting foundry biz; Chem vendors expands to Asia SCP Global Technology, SPIE's Symposium on Microelectronic...
• Microwave Photonic Systems Corportate Capability Statement
  , telecom, SATCOM and wireless products. RF and Fiber Optic Interface Design, Development and Manufacture: RF, fiber optic, photonic product designs span DC to 40 GHz. Analog, Digital, and Mixed Signal Micro-Electronic Design and Manufacture: embedded processors, power supplies, digital interfaces...
• What drives defect detection technology?
  ),1 to form its own subgroup dedicated to this subject. Defects are considered events that lead to or can lead to electrical faults in microelectronic circuitry. Their detection requires extensive use of in-line inspection tools, in situ sensors, and electrical testing and failure analysis equipment...
• MICRO:Product Technology News (March '99)
  Equipped with a front-opening unified pod, the V 300-SL surface profiler enables users to monitor process wafers in a fully automated environment. Stylus-based measurement technology provides step height repeatability for monitoring the uniformity of etch and deposition processes. The profiler's...
• MICRO:Archive:June 1997:Semicon Technical Programs
  Systems Filtration of CMP Slurries inChemical Delivery Systems Parameters for Monitoring CMP Slurry Stability and Contamination Plasma Etch 97 Backgrounder and New Developments Instructor: Daniel L. Flamm, University of California, Berkeley Plasma Etching Fundamentals and Emerging Trends Daniel L. Flamm...
• Movin'On
  semiconductor group. . . . Solid State Measurements of Pittsburgh has appointed Blake Wotring vp, operations. . . . Eric Branch has been named business manager, process chemicals, by Olin Microelectronic Materials. He most recently served as business director of Olin's diffusion systems and equipment...
• MICRO: Expansions & Acquisitions
  on the emerging market for copper and low-k processes. Philips Advanced Metrology Systems (AMS) will specialize in tools for measuring the thickness of interconnect metal films during on-line process monitoring. As part of the launch, Philips says it has boosted investment in the SurfaceWave...

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