Microelectronic Monitoring System

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• Case Study: Sensors for Conditioning Monitoring High Voltage Switching
  , health monitoring and control. "Conventionally a hydraulic servo-system would be used, which is a relatively expensive system. We have designed and engineered a system which provides the accuracy of a typical servo for half the cost.". For this project, Domgas had developed a system whereby a highly...
• Microwave Photonic Systems Corportate Capability Statement
  , telecom, SATCOM and wireless products. RF and Fiber Optic Interface Design, Development and Manufacture: RF, fiber optic, photonic product designs span DC to 40 GHz. Analog, Digital, and Mixed Signal Micro-Electronic Design and Manufacture: embedded processors, power supplies, digital interfaces...
• Using MEMS to Control Blending at AstraZeneca
  that the now-bulky optical/mechanical part of a spectrometer can be miniaturized to match the microelectronic solutions that are currently available. This combination produces a combined microoptic-micromechanical-microelectronic system. Advantages of MEMS-based NIR spectrometers are their small size...
• MICRO:Industry News:Expansions & Acquisitions (Sept. '98, p.26)
  Client demand was the main reason that Olin Microelectronic Materials and Matheson Semi-Gas Systems signed their recent deal to combine their respective chemical and gas management services in one package. "Customers [told us] they were looking for one company to offer both gases and chemicals...
• MICRO:Archive:Back Issue TOC
  cartridge, oxygen analyzers, slurry monitoring system, specialty-gas analysis, industrial microscope, water purification system, differential pressure controller, copper slurries, CMP pad conditioner, linear positioning stages, thermoplastic material, LCD array test system, noncontact measuring system...
• MICRO: Rebuilding Copperopolis - Biolsi (July 2000)
  hardware problems that were a source of particles, and verify that defect levels had in fact been reduced as a result of installing new hardware. The article also explains how a short-loop monitoring system using monitor wafers to determine particle levels helped to quantify particles on the etchers...
• What drives defect detection technology?
  in Digital Integrated Circuits," IEDM Technical Digest, p 11, 1975. 5.The National Technology Roadmap for Semiconductors, San Jose, SIA, pp 163 178, 1997. 6.Dennison C, "Developing Effective Inspection Systems and Strategies for Monitoring CMP Processes," MICRO, 16(2):31 41, 1998. 7.Shapiro A, James...
• MICRO:Archive:June 1997:Semicon Technical Programs
  Systems Filtration of CMP Slurries inChemical Delivery Systems Parameters for Monitoring CMP Slurry Stability and Contamination Plasma Etch 97 Backgrounder and New Developments Instructor: Daniel L. Flamm, University of California, Berkeley Plasma Etching Fundamentals and Emerging Trends Daniel L. Flamm...
• MICRO:Product Technology News (March '99)
  measures any type of fragile, brittle, or polished material, including thick or extra thin wafers measuring up to 300 mm. Applications include CMP monitoring, square wafer mapping, and thickness measurement of nonconductive material. (Semicon Europa, Booth A1.344N) Microcleaving System SELA...
• Using two-dimensional ion chromatography to measure contaminants in ultrapure chemicals ( First in a series)
  Jian-Ge Chen and ManLi Wu, Because the purity of process chemicals plays an important role in device reliability, the continuing increase in the scale of integration for semiconductor devices has led to the need for monitoring trace levels of ionic contaminants. Parts-per-billion-level cationic...

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