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Supplier: First Sensor AG
Description: First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements. The capacitive
- Frequency Range: 400 to 800 Hz
- Number of Axes: Biaxial
- Sensor Technology: Capacitance
- Device Type: Sensor / Transducer
Description: 3 axis Inertial Measurement Unit (IMU) Acceleration and angular Speed measurements Compact and Robust Designed for severe environments Low Cost, high Performances Easy to use The Sensorex 43030 inertial reference incorporates 3 micro-machined silicon accelerometers (5.10-3 class), and 3Show More
Description: The Endevco model 7270A series of piezoresistive accelerometers are rugged undamped units designed for shock measurements. Endevco micromachines the sensing system of the 7270A from a single piece of silicon. This etched silicon chip includes the inertial mass and strain gages arranged
- Acceleration: -60000 to 60000 g
- Frequency Range: 0.0 to 136000 Hz
- Number of Axes: Single Axis
- Sensor Technology: Piezoresistive
Supplier: MEMSense, LLC
Description: The Tri‐Rate is a complete tri‐axial angular rate sensor based on a surface‐micromachining technology capable of sensing angular motion about three orthogonal axes. The Tri‐Rate provides analog outputs for angular rate and precision references about the X, Y, and Z axes
- Angular Rate Range: 25 rpm
- Transverse Sensitivity: 4 ±% Full Scale
- Linearity: 0.1000 ±% Full Scale
- Linear Acceleration Range: 2 +/-g
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MEMS Vibratory Gyroscopes
the DRIE process in recent years provided design flexibility unimaginable with wet etching, and dramatically accelerated the development of bulk micromachined iner- tial sensors .
Sensor Fusion Methodology to Overcome Cross-Axis Problem for Micromachined Thermal Gas Inertial Sensor
MOST micromachined inertial sensors generally use a mechanical structure including a solid proof mass attached to springs .
Single crystalline silicon based surface micromachining for high precision inertial sensors: technology and design for reliability
Abstract In this paper, a foundry process for surface micromachined inertial sensors such as accelerometers or gyroscopes is introduced, with special attention on reli- ability aspects.
Higher Order Noise-Shaping Filters for High-Performance Micromachined Accelerometers
Abstract— Micromachined inertial sensors that have been in- corporated in sigma–delta force-feedback loops have been proven to improve linearity, dynamic range, and bandwidth, and also provide a direct digital output.
Springer Handbook of Nanotechnology
Yazdi, F. Ayazi, K. Najafi: Micromachined inertial sensors , Proc. IEEE 86, 1640–1659 (1998) 8.52 F.
Springer Handbook of Nanotechnology
Yazdi, F. Ayazi: Micromachined inertial sensor , Proc. IEEE 86, 1640–1659 (1998) 7.50 F.
SENSORS AND MICROSYSTEMS, PROCEEDINGS OF THE 5TH ITALIAN CONFERENCE EXTENDED TO MEDITERRANEAN COUNTRIES
From single to multi-axial, decoupled mode micromachined inertial sensors with midos .
The demand for silicon micromachined inertial sensors is expected to grow tremendously in the next few years.
A high-performance accelerometer with a fifth-order sigma–delta modulator
High-performance micromachined inertial sensors with microgram resolution usually take advantage of closed loop control to increase their dynamic range, linearity and bandwidth.
Sensors | Free Full-Text | Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors
Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of …