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Micron Resolution Profilometer

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  • Inspecting Hard-to-Reach Surfaces (.pdf)
    ). Using light. to-reach surfaces because of their size. A fiber-based. sources in the near infrared range, a fiber-based. profilometer acquires one point at a time. Its. profilometer can measure with micron precision. lightspot must be moved in order to acquire an entire. Fiber-based profilometers...
  • MICRO: Expansions etc.
    applications of resolution enhancement techniques (RETs) for the 95-nm and below technology nodes. As part of the deal, the chipmaker gets a global license for the optical extension technologies company's intellectual property portfolio to use in its production fabs. Micron will also buy ASML's...
  • Meeting the challenge of submicron defect characterization on final-polished wafers
    three-dimensional defects may measure in the nanometer, submicron, or micron ranges. The most common defects seen on final-polished wafers are subsurface damage, pits, and protrusions (nodules or bumps). Subsurface damage presents itself as lattice distortion or residual stress. This damage may...

Engineering Web Search: Micron Resolution Profilometer

Nanounity, Solutions for nano imaging & analysis
High resolution AFM and STM imaging to atomic resolution Fast scanning AFM up to 40Hz scan speed over 100 X 100 micron area
See Nanounity  Information
CNF - Lab and Equipment Information
7300 rapidly measures heights from less than 1 micron up to 20 millimeters, with vertical resolution to 0.1 nm. It is ideally suited for inspecting
CNF - Lab and Equipment Information - WYKO HD-3300 Optical...
7300 rapidly measures heights from less than 1 micron up to 20 millimeters, with vertical resolution to 0.1 nm. It is ideally suited for inspecting
Michigan Engineering | Welcome to MIBL
Dektak Profilometer Hardness Indenter Residual Stress
Profilometer for non-contact surface measurement, confocal...
Affordable Profilometer Our profilometer systems feature fast and
See Solarius Development Inc. Information
Nanolab
Resolution in thin film resists down to .9 micron can be achieved.
Raytheon Company: Design and Fabrication Capabilities
1.0 micron resolution Karl Suss MJB-3 Mask Aligners Sub-Micron Photolithography Evaporative and Sputter Metal Deposition
See Raytheon Company Information
Klystron Metrology
Surface finish parameters can also be measured using a Taylor Hobson profilometer with a resolution of 16nm.
CFN News: Clean Room
ion beams, direct beam-induced deposition of platinum wiring and high-resolution imaging and spectroscopy.
High-resolution actinic imaging and phase metrology of 193-nm...
high-numerical-aperture (0.75 NA) optics to provide 200X magnification, 150-nm Rayleigh resolution and 35-nm pixel size over a 30-micron image field.

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