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Microscope Oblique Illumination

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  • MICRO:May 98:Product Technology News
    Designed for inspecting wafers in CMP and other advanced interconnect processes, the ILM-2230 combines small-pixel, high-data-rate image processing with oblique-angle darkfield laser illumination for high-throughput production line monitoring. By reflecting light off the wafer at an angle instead...
  • 3D Visualization for Industrial Quality Inspection
    to document even. ture. a specimen with little texture. For example, you can select an oblique inci-. dent illumination that makes even hidden structures visible. 4. T = n·[l/(2·NA2) + 340 m/(NA·M. )]. VIS. TOT VIS. Mechanics and Illumination. 3. Mechanical resolution in the vertical direction. Illumination...
  • Basics in Microscopy
    Contrast (IMC) – Oblique Illumination Enhances Visibility of Living Cells 01. Jun 2011 Authors: Thomas Veitinger, Bernard Kleine, Dipl.-Phys. Institute: Leica Microsystems, Wetzlar, Germany Hoffman modulation contrast has established itself as a standard for the observation...
  • MICRO: Manufacturing Effectiveness
    and detection sensitivity tend to overcome limitations in lasers with shorter wavelengths. For example, an illuminating laser can be placed at various angles of incidence to accommodate suppression of surface noise. Detectors in dark-field systems are photomultipliers that are placed at oblique angles...
  • MICRO:July/August 98:Product Technology News
    on wafers 300 mm and smaller. The system's oblique darkfield illumination capability makes it suitable for use in postetch and CMP applications. The dark-field feature enables the system to differentiate between killer and nuisance defects. (Semicon West, San Francisco, South Hall, Booth 1526) Ozone...
  • MICRO: Classifying defects for copper CMP process modules
    , leaving the wafer surface fairly flat. Hence, defects at the CMP layer have traditionally been characterized by light-scattering techniques. Such defects have typically been measured on blanket films under normal or oblique illumination. Although the Surfscan 6200 and 6420 from KLA-Tencor have...
  • MICRO: Defect/Yield Analysis
    , low-angle laser illumination, and an integrated optical review microscope. The oblique laser incidence provides for robust measurements of the thickness variations and roughness of CMP layers. Experimental Procedures. Unpatterned TEOS test wafers with an initial oxide thickness of 750 nm were used...

Engineering Web Search: Microscope Oblique Illumination Top

Molecular Expressions: Images from the Microscope
We are going where no microscope has gone before by offering one of the Web's largest collections of color photographs taken through an optical
The Molecular Expressions Photo Gallery
thousands of full color photomicrographs (photographs taken through a microscope) and digital images selected from our many image collections.
Stanford Light Field Microscope Project
Stanford Light Field Microscope Project
Recording and controlling the 4D light field in a microscope
After passing through a microlens array and the microscope objective Ob, we obtain the illumination shown in the middle row.
Microscopy - Wikipedia, the free encyclopedia
1.2.2 Oblique illumination 1.2.3 Dark field [edit Oblique illumination The use of oblique (from the side)
JDSU - FM-L Field Microscope

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JDSU - FM-L Field Microscope

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Techniques in Light Microscopy; PMB 185 F2011
Contrast derived from Light Scattering: Darkfield microscopy, Rheinberg Illumination, Oblique Illumination
Mitutoyo 176-808A Toolmaker's Microscope... from Amazon.com
Title: Mitutoyo 176-808A Toolmaker's Microscope with Digimatic Micrometer Heads, 30X Magnification Brand: Mitutoyo Manufacturer: Mitutoyo Model:
Molecular Expressions: Science, Optics & You - Olympus MIC-D:...
Darkfield Illumination - In traditional optical microscopy, darkfield illumination requires blocking the central light that ordinarily passes through

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