resolution and surface imaging as a
result of geometries that are decreasing in overall size. Thus, deep-UV imaging, which allows examination of many fine details measuring down to less than 0.10 μm, has become increasingly popular for this application. As with the near-IR technique, deep-UV requires no sample preparation and is fast, particularly when compared with scanning electron
microscopy, where queue time can delay important
results. Much like the IR system, a deep-UV optical system...
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