Nanometer Resolution Measuring Equipment

Conduct Research

• Accurately measuring ultraslow motion
  range. Graduations are scanned without mechanical contact or wear. Light passes through a reticle and over the scale onto photo-voltaic cells. These produce sinusoidal output signals with a small signal period. Interpolation by system electronics generates measuring steps in the nanometer range...
• MICRO: Behind the Mask- Kasprowiez (Feb 2000)
  Bryan S. Kasprowicz and Benjamin G. Eynon, metrology, the critical dimension scanning electron microscope (CD SEM) has long been the instrument of choice for measuring submicron features because of its nanometer-scale resolution and ever-improving throughput. Because photomask features historically...
• Nanotechnology Confronts The "Bad Hair Day," Tests New Conditioner
  – a fact confirmed by the AFM as researchers dragged a tiny needle across the surface. Conditioner tends to stick to the cuticle edges, and can make the hair sticky on the nanometer scale. The researchers determined that by poking the hair shaft with the needle, and measuring the force required to pull...
• MICRO:Product Technology News (Oct '99)
  Matrix S200 metrology systems for CMP and etch provide application-specific sets of metrology techniques. The S200 CMP system has a 5 ' 10-mm-spot, 633-nm HeNe laser ellipsometer for measuring on-product substrate n and k and a 2.5-mm-spot, 470 905-nm reflectometer for measuring film thickness...
• Displacement Sensing the Baumer Electric Way
  etc.). Typical polynomial function. · high resolution. (based upon measuring. · short reaction time. characteristics of a Baumer. · resistant against pollution. Electric 12 mm tubular dis-. · small size. placement measuring induc-. · relatively low cost. tive sensor). Distance = a + b (lout) + c...
• Meeting the challenge of submicron defect characterization on final-polished wafers
  three-dimensional defects may measure in the nanometer, submicron, or micron ranges. The most common defects seen on final-polished wafers are subsurface damage, pits, and protrusions (nodules or bumps). Subsurface damage presents itself as lattice distortion or residual stress. This damage may...
• Piezoelectrics in Positiong
  , controlling. each manufacturing step from PZT raw. materials to finished systems thus. ensuring the best quality. Variety of "cofired" and "classical" piezo stacks and rings. Response of an open-loop piezo actuator to triangule-wave drive signal. shows sub-nanometer resolution. Sputtering (vacuum...
• A conveyor for sealed environs
  , and solar cells as well as any process done in a vacuum, clean-room, aseptic, or gas-sensitive environment. While the basic technical concept is brilliantly simple, implementation involved complex technical issues. One problem concerned measuring the true position of each carrier without physical...
• Digital Microscope Helps Detect Counterfeit Currency
  . A Marriage of Two Technologies. 12. 3D Measuring Microscope Combines Confocal. and Interferometry Techniques. Characterization of Solar Cells. 15. Nanometer Precision and lightning Speed. No Defect Goes Undetected. 17. Inspection of Microoptic Components. 2 resolutioN. D I G I TA l M I C R O S C O P y...
• MICRO: Archive: Back Issue TOC
  : ALD maps out its place in the nanometer-scale world. Lefty: Edge cutters. Breakout: New photomask facility in Dresden combines R&D, pilot, and production lines. Breakout: Rudolph, SCP Global grab first-to-market honors with new product launches. 'Round the Circuit: Crolles2, LETI ink R&D pact...

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