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Nanometer Resolution Metrology Equipment

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Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
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  • MICRO: Behind the Mask- Kasprowiez (Feb 2000)
    Bryan S. Kasprowicz and Benjamin G. Eynon, metrology, the critical dimension scanning electron microscope (CD SEM) has long been the instrument of choice for measuring submicron features because of its nanometer-scale resolution and ever-improving throughput. Because photomask features historically...
  • MICRO: Prod Tech news
    of days, reducing the cost of ultra-high-resolution analysis. (Semicon Europa, Booth B1.370). Workstation/Equipment Monitor. Novx. San Jose, CA. In addition to monitoring electrostatic chucks and electrostatic discharge, the Series 7000 workstation/process equipment monitor can communicate...
  • MICRO: Archive: Back Issue TOC
    deposition controller, aqueous develop/etch tool, excimer laser micromachining, sample-preparation platform, stainless-steel gas springs, wireless autoleveling sensor, wireless maskmaking sensor, linear CD source, FPD measurement tools, mask metrology system Vendor offers RF atom source/RF ion source...
  • MICRO:Product Technology News (Oct '99)
    Matrix S200 metrology systems for CMP and etch provide application-specific sets of metrology techniques. The S200 CMP system has a 5 ' 10-mm-spot, 633-nm HeNe laser ellipsometer for measuring on-product substrate n and k and a 2.5-mm-spot, 470 905-nm reflectometer for measuring film thickness...
  • MICRO: The Hot Button
    Challenges Abound on Road to 45 nm and Beyond Welcome to the first installment of "The Hot Button." In each issue, this feature will present discussions by industry experts about the critical challenges facing one of four key focus areas within advanced chip manufacturing: lithography, metrology...
  • Piezoelectrics in Positiong
    , controlling. each manufacturing step from PZT raw. materials to finished systems thus. ensuring the best quality. Variety of "cofired" and "classical" piezo stacks and rings. Response of an open-loop piezo actuator to triangule-wave drive signal. shows sub-nanometer resolution. Sputtering (vacuum...
  • MICRO:Product Technology News (Sept. '98 p.60)
    by more than 50%. Developed for use with the IVS-120 metrology tool, Adaptive RG software offers the capability to measure targets with either unclear images or suboptimal edge resolution. Uneven polishing in the STI processes required for higher device densities can result in inconsistent target...

Engineering Web Search: Nanometer Resolution Metrology Equipment Top

NanoStructures Laboratory
Generally, commercial processing equipment, designed for the semiconductor industry, cannot achieve the resolution needed for nanofabrication, is
Interferometry - Wikipedia, the free encyclopedia

Graphene - Wikipedia, the free encyclopedia

attocube - pioneers of precision
Highest precision motion on the nanometer scale at ambient conditions, low temperature, UHV and high magnetic fields [learn more.
See attocube systems AG Information
Fabtech - Online information source for semiconductor...
After a two-year term at solar equipment supplier Spire, Dr. Avishai Kepten has returned to the semiconductor equipment sector as Vice President and
See Semiconductor Media Limited Information
Machine Dynamics Research Laboratory
Spindle and Roundness Metrology 6 nm This work establishes techniques that advance the 0 -6 standard practice in spindle metrology and enable five
See Machine Dynamics Research Lab Information
Spindle Instrumentation for Grinding Ceramics
Nanometer Level Spindle Metrology Fixed sensitive radial error motion in the x-direction 6 18 L = 200 mm 0 0 6 -6 -18 The synchronous fixed sensitive
See Machine Dynamics Research Lab Information
Physikalisch-Technische Bundesanstalt (PTB): 5.2 Dimensional...
The Nanometer Comparator Measurement Equipment 5.22 Mask Metrology 5.23 Angle Metrology
See Physikalisch-Technische Bundesanstalt (PTB) Information
Olympus - Non Destructive Ultrasonic Test Equipment, Innov-X,...
Optical Metrology Videoscopes, Borescopes
See Olympus IMS Profile & Catalog
Netscape | Company Boardroom
VECO), a leading supplier of advanced three-dimensional AFM metrology equipment to the semiconductor industry, announced today that its InSight? 3D

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