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MICRO: Product Extra!
allows lithographers to use the company's standard PhotoKleen EZD-2 filter capsule with the P-Nylon filter media on two-stage pump systems. The slide version of the adapter allows for quick and easy fit-up into existing installations, requires minimal tool interruption, and can be used as a fast
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Filter Bag Basics
. The double length vessel takes a P2, N2, or #12 bag. Maximum flow rates are 50 gpm for a #11 bag and 110 gpm for a #12 bag. Fabrics. The four most common fabrics used in the construction of industrial filter bags are polypropylene, polyester, Nylon and Nomex, although others are available
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All-in-one air filter, regulator, and lubricator
um, but a 0.3-um filter option effectively separates tar and carbon. The devices work in temperatures from 5 to 60 C. Though it is a polycarbonate bowl is standard in the lubricator, nylon and aluminum bowls are available. new machine lubrication concept
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The Influence of the Expansion Process on Pore Size
filter media. Dexmet's proprietary expand process is capable of expanding all fluoroplastics, polyamides, polyesters and many other types of high temperature resins in film thickness of .001" - .090"; with pore sizes extending to 25 microns. An introduction to Dexmet's expand process, clean room
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MICRO: Tool/Fab Support
chemistry of the membrane without further pore-size reductions do result in the virtual elimination of defects in both the resist and antireflective coating layers. While some performance improvements depend on the filter surface and pore size only, other improvements depend on the volume of photochemical
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Product Technology News
. An exhaust airflow removes the particles. The Uvahand 250BL handheld UV lamp detects particles and microcontamination in cleanrooms. The 3-lb unit is especially useful for mobile applications, and it operates in all lighting conditions. It is equipped with a 250-W metal halide lamp and a black filter
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Treating wastewater from CMP using ultrafiltration
in Figure 1, silica particles in an oxide slurry can range in size from 20 to 80 nm, far too small to be retained by microfilters alone. To be effective, cross-flow microfilters need to build up a dynamic layer, similar to a filter precoat. Achieving this buildup frequently requires the addition
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MICRO:
wafer-transport system, plasma impedance monitor, evaporation system, mass-flow controller, film metrology software, wafer treatment systems, heat exchangers, and more Supplier offers advanced CMP slurry characterization; vendor's filter capsule expedites changeouts in photoresist applications; manufacturer