Optical Inspection Microstructures

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• Metallurgical Inspection Using A Scanning Electron Microscope
  The properties of many engineering materials are mostly governed by a combination of metal composition. and the morphology and distribution of key microstructural features. These features can be observed with. conventional optical microscopy. However, when higher magnification and 3D detail...
• MICRO:July/August 98:Product Technology News
  Canton, MA The MX-1500 symbology and optical character recognition controller decodes and automatically reads up to 1500 one- or two-dimensional texts or OCR codes per minute. The system can support eight independent cameras capable of reading any symbology in a range of semiconductor manufacturing...
• MICRO: Products
  The Dynamic MEMS measurement option for the Wyko NT1100 optical profiler provides 3-D characterization of microdevices as they actuate, enabling the assessment of true device functionality and measurement of in- and out-of-plane dimensions. The noncontact optical profiler uses white-light...
• MICRO: Critical Materials
  front has been the ability to distinguish between background reflectance and actual in-film defects using optical instruments. Over time, Novellus has developed an extensive defect library with links to their sources, including plating chemistry, process conditions, and hardware. Examples from...
• Effect of Corona on Nonceramic Insulator Housing Materials
  : Heat treatment with laser. The temperature distribution is determined by the thermal and optical properties of the material. When the laser intensity (I) reaches a critical value (Iv) beyond which there is a significant material vaporization, a vapor plume is formed as shown in Fig. 2. Fig 2: Heat...
• MICRO: Archive: Back Issue TOC
  assets; Matheson to double capacity; ATMI buys ESC; Implant Sciences to triple capacity. MEMS Zone: Optical outlook is strong; Planartechnik buys QuickSIlver inspection tool; CD tool installed at U of Alberta; Silex purchases EV Group litho tools. TECHNICAL ARTICLES. Taking Control 2: Developing...
• MICRO:May 98:Product Technology News
  , pattern deformations, microbridging, and other yield-critical defects on devices with linewidths 3/40.25 um. Two advanced optical filtering techniques facilitate collection of nonrepetitive defect signals and block noise from vertical and horizontal lines. In addition, the company's proprietary...
• MICRO:Semicon West '99 (June '99)
  ..........1400 Interlink..........2962D Interserv..........2811 Ion Implant Services..........1906 Ion Tech..........1610 Irvine Optical..........232 Itochu Technology..........3031 Iwaki Walchem..........638 Jena-Tec..........3018B JEOL..........1215 Jipelec..........2005A JLC International...
• Using SSA to measure the efficacy of automated defect data gathering
  Ridge, TN. His technical research includes scene analysis and pattern recognition for machine vision as applied to industrial real-time, high-speed inspection, and automation problems. He has been doing research with the semiconductor industry since 1991, performing R&D for optical image defect...
• MICRO:Product Technology News (Oct '99)
  provides quantitative surface height mapping for 3/40.18-um technology, bridging 200- and 300-mm wafer sizes. It provides whole wafer topology data, using noncontact optical measurement to precisely quantify nanometer-scale surface height variations. Tracking the phase of the optical signal using...

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