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Optical Mark Detection

 

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Machine vision systems are used for automated inspection and measurement in production environments.
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  • Object Discrimination and Optical Performance Of a Real-Time 2-5 µm Hyperspectral Imager
    at a 2 cube-per-second frame rate. Real-time discrimination applications include finding and tracking varied gas plumes, industrial hygiene and process monitoring, and personnel tracking. Microsoft Word - 2007-024 Dombrowski.doc. Object Discrimination and Optical Performance. Of a Real-Time 2-5 µm
  • MICRO: Product News
    in the range of 200 800 nm. The SD1024 is designed for low-exposed-area end-point detection, plasma diagnostics, and process control applications. The compact unit uses a scientific grade TE-cooled charge-coupled device that is backthinned for enhanced ultraviolet sensitivity. The compact optical design
  • MICRO: Defect/Yield Metrology - Schramm (October 2000)
    of the metal layers compensates for the low topography, so that enough optical signal is supplied to the metrology tool for adequate measurement. In front-end CMP processes such as STI, however, the registration marks are much more difficult to observe. Robust broadband optics with spatial filtering
  • MICRO:Industry News:Breakout (Feb 99)
    Alternative lithographic methods, the semiconductor industry's equivalent of baseball's "wait-til-next-year" teams, may finally have their day in the sun. Several novel techniques standing ready to pinch-hit for optical lithography will be in the spotlight during a three-day conference at the 24th
  • Spitzer Leads NASA's Great Observatories to Uncover Black Holes, Other Hidden Objects in the Distant Universe
    Space Telescope today, and announced the detection of distant objects including several supermassive black holes that are nearly invisible in even the deepest images from telescopes operating at other wavelengths. Dr. Mark Dickinson, of the National Optical Astronomy Observatory, Tucson, Ariz
  • MICRO: Products
    wafers/hr at 0.079-um sensitivity. The instrument's multibeam and polarize optical system offers excellent detection for such new materials as high- and low-k dielectrics, silicon on insulator, and silicon germanium. A strictly mechanical edge-grip handling system supports the wafer to improve
  • MICRO:Outlook 2000 (Nov '99)
    , which is one of the key challenges facing defect detection that we are addressing with suppliers. That is only going to get more difficult simply because as you shrink down the feature sizes the inspection tools that we are using right now, especially in the optical arena, must keep pace
  • Case Study: High Resolution Inspection for Dental Imaging System
    stage. Because of the improvements in the structure of the deposited CsI, imperfections are getting smaller and smaller, making them difficult to detect. AST has developed a high quality proofing system based on an optical inspection microscope and a camera system for X-ray inspection that is used

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