Optical Scanning Topography Instrument

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• Comparing Tactile and Optical Technologies (.pdf)
  the results. of the analysis. Optical scanning methods do just that--they change the way profiles are. generated. This is not to say optical methods are better or worse, but they. are different. Figure 1. Regardless of the. There are a wide variety of different methods and technologies used for. method...
• SmartMovesTM Spotlights: Veeco Instruments, Inc. (.pdf)
  new Wyko® Optical Profilers, directed by. a series of Galil motion controllers, provide non-. contact, three-dimensional measurement of sur-. face roughness and topography, with sub-. nanometer resolution. The measurements are. accurate, repeatable and high speed. Veeco chose Galil's Ethernet-based...
• MICRO: Defect Analysis and Metrology - Ge (Feb 2000)
  to find ~0.1-um defects easily. This limitation makes AFM-only defect review difficult and time-consuming. To surmount this limitation, an integrated defect review tool combining a dark-field (DF) optical microscope with an automated TappingMode AFM has been developed by Digital Instruments, Veeco...
• Measuring Surface Slope Error on Precision Aspheres (.pdf)
  of optical specifications and drawings where the slope error of the optical surface has been specified. 2.1. Laser Dimensional Gauging Instrument. A laser dimensional gauging instrument1 uses a laser beam stripe between confocal parabolic mirrors to measure the. physical diameters, lengths...
• Using Space-Age Technology to Open A New Window into the World of Horticulture
  , rather than scanning the cell surfaces. A 3-D Glimpse Into Plant Space The fourth microscope, an earlier acquisition, is called a confocal laser scanning microscope. It scans optical "slices" of the specimen and reassembles them by computer into three-dimensional images of the cell structures...
• Spatial Coherence in Interferometry
  in designing commercial interferometers is to reduce the intrinsic measurement noise in the complete band of spatial frequencies which the instrument is able to measure. Here the large coherence of the laser turns out to be a problem, 'collecting” artifacts associated with the optical surfaces used...
• Advanced Digital Technology Breaking Ground in Light Microscopy (.pdf)
  With relatively few progressions in conventional optical microscopy during the past decade, pushing through the physical limitations of these systems has proven to be challenging. Engineers have developed solutions to some of the limitations in modern micro-analysis that had appeared to reach...
• Surface Profiling by Frequency Domain Analysis of White Light Interferograms
  . features unambiguously with white light. Now let's take a look at some hardware. Figure 1 shows the optical configuration of a. scanning white-light interferometric microscope. Interferograms for a each of the image points in. the field of view of the instrument are generated simultaneously...
• MICRO: Defect Analysis
  processing issues rapidly. This article focuses on inspection strategies for three DRAM layers. In addition, the article compares current optical inspection tools and correlates tool data results with end-of-line probe results. Automated bright-field wafer inspection tools, which were introduced more than...
• MICRO: Spotlight
  ). Automatic particle sizer. The AccuSizer 780/ APS automatic particle sizer from Particle Sizing Systems uses single-particle optical sensing to quickly count and size a large number of particles, one at a time, thereby constructing a true particle-size distribution. The fully automatic instrument...

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