Parts Per Billion Determination

Conduct Research

• Using an in-line monitor to obtain real-time moisture measurements (First of two parts)
  calibrated in parts per billion. The systems used to monitor moisture in process gases range from highly accurate, and expensive, atmospheric pressure ionization mass spectroscopy (APIMS) analyzers to a variety of less accurate, less costly alternatives. Two widely used detection devices are coulometers...
• MICRO: Tool/Fab Automation
  not. contaminate the part. Transition metals (e.g., copper and iron) cannot be detected with the same equipment used for common anions adn cations. Can detect only water-soluble ions. Medium-high sensitivity (parts-per-billion levels in solution). Table I: Comparison of surface analytical techniques. Sample...
• Measuring trace ionic impurities in ultrapure acids and bases with ion chromatography (Third in a series)
  acid can also be removed by selective precipitation of the main anion with a cation fixed onto an ion-exchange resin. The method has been applied to the determination of anions in H3PO4 and H2SO4.14,15 In this study, the approach has been used to analyze parts-per-billion levels of anions in 37% HCl...
• MICRO: Critical Materials Delivery
  , unfiltered chemicals drawn from the fab's chemical-distribution units (CDUs) against filtered samples from the day tank. At parts-per-billion and sub-parts-per-billion levels (the trace levels of interest), the delivery system maintains its integrity while preserving the purity of the incoming...
• Spectroscopic Diagnostics of an Atmospheric Microwave Plasma
  A 1.5 kW, 2.45 GHz microwave sustained plasma in a flowing sample of stack exhaust. gas has been shown in recent DOE/EPA testing to be an accurate monitor of trace. hazardous metals (in the part per billion range) such as lead, chromium, and beryllium. Optical-UV spectroscopic studies are being...
• Product Technology News
  levels in parts per million or parts per billion. An on-board data logger automatically stores results. The instrument can operate in a quick-scan mode for screening total VOC content in ambient air or in a point-and-press mode for collecting data on preselected compounds. Cassette Tester Sun West...
• MICRO: Critical Materials
  storage tanks as a single supply source instead of cylinders as supply sources for individual tools. In light of these trends, it is imperative to have a robust, continuous process instrument with a single-digit parts-per-billion detection limit that can measure moisture in ammonia. The challenge...
• Beta testing an in-line monitor for moisture measurement in inert gas lines
  a one-time factory calibration. A calibration constant is programmed into the monitor's onboard electronics for use in calculating the moisture level (in parts per billion by volume, or ppbv) from the frequency change per unit of. MICRO:July 97:Ultrapure Gases by Maura I. Toth (p.79). MICRO Advertiser...
• Using two-dimensional ion chromatography to measure contaminants in ultrapure chemicals ( First in a series)
  Jian-Ge Chen and ManLi Wu, Because the purity of process chemicals plays an important role in device reliability, the continuing increase in the scale of integration for semiconductor devices has led to the need for monitoring trace levels of ionic contaminants. Parts-per-billion-level cationic...
• Fundamental Conductivity and Resistivity of Water
  the sub-parts-per-billion range, is used exten-. much larger. The density of water is known to relatively high. sively in many critical applications. Applications include. accuracy. In particular, the data prepared by Schmidt,4 given. chip fabrication for semiconductors, intravenous solu-. for 1°C...

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