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  • Pellicle Application Notes
    In general, at angles greater than fifteen degrees, coated or uncoated pellicles will transmit more P polarized light than S polarized light: the coated or uncoated pellicle will reflect more S polarized light; than P polarized light. Pellicles, with or without coatings, can be manufactured to meet
  • Pellicles: Technical Information
    Two of the most important attributes of pellicles are the elimination of secondary (ghost) reflection and the elimination of beam displacement and refractive error on transmission. Critical flatness and transmission specifications can be met with interferogram documentation. These attributes
  • MICRO: Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography
    promising candidate materials with absorbances <0.03/ um to achieve pellicle transmissions >95%. In order to successfully fabricate 157-nm pellicles from these fluoropolymer materials, the materials must have the appropriate molecular weight, glass transition temperature, and mechanical strength
  • MICRO:'Round the Circuit
    of lithography strategy, in a presentation at the annual SPIE Microlithography conference in February. Ware told the gathering in Santa Clara, CA, that other technical challenges still must be met. These include solutions for pellicles and the development of suitable photoresist processes
  • MICRO:Editor's Page
    chipmakers have reiterated their qualified support for 157, while acknowledging major challenges in the mask, pellicle, and optics areas. Such support
  • MICRO: Product Handling and Automation - Fosnight (May 2000)
    , transport, and handle reticles. Existing standards defined only the size of reticles (SEMI P1, P34) and pellicles (SEMI P5), which are used to keep particles out of the focal plane. No reticle standards have existed for carriers, tool interfaces, or automation systems, perhaps because of the variety
  • MICRO:Archive:Back Issue TOC
    pellicles Siemens, Intel, Macronix to build Thai fab; Mitsubishi, Honeywell form wet-process chemical alliance; Komatsu, Ushio launch excimer laser business Motorola opens Romanian center; Lytron hires AMS Thermotech as UK distributor BOC Edwards, Pelchem to build plant in South Africa DRAM production

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  • Löffler / Petrides biochemistry and Pathobiochemie
    When an aqueous solution is isolated from glucose through a semipermeable (lat: semi: halb; permeare: travel) membrane (only porously for water, not for glucose) from pure water, the water molecules of the high Wasserkonzentration=reinesWasserdurchdieMembranbarriere migrate to the glucose solution with...
  • Biochemistry and Pathobiochemie
    Induce now a proton the Weiterrücken of the ring about a c-subunit that moves through these channels of a side of the diaphragm on the other hand, so, arises a rotation that are transferred over the central style to the F1...
  • Membrane process
    ...difference of the chemical potential .....................8 1.5 mass transfer resistances on the diaphragm .....................................................14 1.6...
  • Physiology of the human
    the plasma diaphragm , dynamics of the nuclear envelope, aldosterone and hypertension.
  • Biochemistry of the food
    The evolutionär initial regulation of the substance passage through the biological diaphragm as well as the control...
  • Molecular virology
    ...when a suitable inductor binds as ligand to its receptor on the cell membrane and triggers the...
  • Road burger − textbook of plant sciences
    Fluid mosaic model of the bio membrane : .
  • Zell- and molecular biology in the overview
    It consists of Cytoplasma and backs away through a lipidreiche diaphragm of the environment (. fig. 1.2).
  • Functional ultrastructure
    The plasma diaphragm .