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  • Pellicle Application Notes
    In general, at angles greater than fifteen degrees, coated or uncoated pellicles will transmit more P polarized light than S polarized light: the coated or uncoated pellicle will reflect more S polarized light; than P polarized light. Pellicles, with or without coatings, can be manufactured to meet
  • Pellicles: Technical Information
    Two of the most important attributes of pellicles are the elimination of secondary (ghost) reflection and the elimination of beam displacement and refractive error on transmission. Critical flatness and transmission specifications can be met with interferogram documentation. These attributes
  • MICRO: Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography
    promising candidate materials with absorbances <0.03/ um to achieve pellicle transmissions >95%. In order to successfully fabricate 157-nm pellicles from these fluoropolymer materials, the materials must have the appropriate molecular weight, glass transition temperature, and mechanical strength
  • MICRO:Editor's Page
    chipmakers have reiterated their qualified support for 157, while acknowledging major challenges in the mask, pellicle, and optics areas. Such support
  • MICRO:'Round the Circuit
    of lithography strategy, in a presentation at the annual SPIE Microlithography conference in February. Ware told the gathering in Santa Clara, CA, that other technical challenges still must be met. These include solutions for pellicles and the development of suitable photoresist processes
  • MICRO: Product Handling and Automation - Fosnight (May 2000)
    , transport, and handle reticles. Existing standards defined only the size of reticles (SEMI P1, P34) and pellicles (SEMI P5), which are used to keep particles out of the focal plane. No reticle standards have existed for carriers, tool interfaces, or automation systems, perhaps because of the variety
  • MICRO:Archive:Back Issue TOC
    pellicles Siemens, Intel, Macronix to build Thai fab; Mitsubishi, Honeywell form wet-process chemical alliance; Komatsu, Ushio launch excimer laser business Motorola opens Romanian center; Lytron hires AMS Thermotech as UK distributor BOC Edwards, Pelchem to build plant in South Africa DRAM production

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