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  • Pellicle Application Notes
    In general, at angles greater than fifteen degrees, coated or uncoated pellicles will transmit more P polarized light than S polarized light: the coated or uncoated pellicle will reflect more S polarized light; than P polarized light. Pellicles, with or without coatings, can be manufactured to meet
  • MICRO: Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography
    Roger H. French and Robert C. Wheland, ; and Joseph Gordon and Edward Zhang, The search for 157-nm pellicle materials has led to the development of fluoropolymers with sufficient transparency to produce transmissions >95%, but the problem of photochemical darkening remains. he introduction
  • MICRO:Editor's Page
    chipmakers have reiterated their qualified support for 157, while acknowledging major challenges in the mask, pellicle, and optics areas. Such support

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