Products & Services

See also: Categories | Technical Articles | More Information

Conduct Research Top

  • Pellicle Application Notes
    In general, at angles greater than fifteen degrees, coated or uncoated pellicles will transmit more P polarized light than S polarized light: the coated or uncoated pellicle will reflect more S polarized light; than P polarized light. Pellicles, with or without coatings, can be manufactured to meet
  • MICRO: Optimizing polymers to increase pellicle lifetime and transmission for 157-nm lithography
    Roger H. French and Robert C. Wheland, ; and Joseph Gordon and Edward Zhang, The search for 157-nm pellicle materials has led to the development of fluoropolymers with sufficient transparency to produce transmissions >95%, but the problem of photochemical darkening remains. he introduction
  • MICRO:Editor's Page
    chipmakers have reiterated their qualified support for 157, while acknowledging major challenges in the mask, pellicle, and optics areas. Such support

More Information Top

Lock Indicates content that may require registration and/or purchase. Powered by IHS Goldfire