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Ball-Valve Seal Solution Eliminates Coolant Leakage Problem Perfluoropolyether (PFPE) fluids are gaining acceptance in a variety of semiconductor applications, particularly as coolants in heat-transfer systems in which fluid must be circulated between a process tool and a chiller. The increased use...

...different types of PFPEs: PFPE-K, PFPE-Y, PFPE-D, PFPE-M, and PFPE-Z -- or, in PFPE shorthand, K, Y, D, M, and Z fluids. All of them contain carbon, oxygen, and fluorine atoms, but each type of fluid is the product of different starting materials and manufacturing processes. Molecular structure...

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