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  • Stainless Steel for Semiconductor Applications (.pdf)
    integrity (health and. to fabrication sites, or fabs. This market is projected to. safety) and contamination are industry concerns. For. grow in the next several years, as nearly 400 fabs will. example, arsine and phosphine, widely used in ion im-. be equipped between now and 2001, and another 170
  • Growing Market for LEDs Fuels Need for Advanced Abatement Systems (.pdf)
    in the high-performance. phosphine, and arsine. In addition, care. and military applications that have historical y been the focus of CS development. must be taken not to create nitric oxide. T. and nitrogen dioxide (i.e., “NOx”) in. he exploding demand for LEDs is driven seek every opportunity to reduce
  • Physical & Thermodynamic Properties of Common Gases
    . —. Oxygen. 0.083. 0.2175. 0.18. -361.12. 6. -297.4. 91.8. Phosphine. 0.095. —. —. -208.3. —. -125.32. —. Propane. 0.126. —. 0.097. -309.82. —. -48.1. —. Silicone Tetrafl uoride. 0.292. —. —. —. —. -90.4. —. Sulfur Dioxide. 0.166. 0.1544. 0.07. -104.8. —. 14. 170.6. Water Vapor. 0.0372. 0.4820
  • Semiconductor Gas Recommendations
    . 6.9. 716. Gas. 12-1. Phosphine. 1.19. 592 /. Toxic. 660 /. Liquefied. 64-2600. 74-2400. 64-2800. 74-2400. PH3. 40.8. Flammable. 632. Gas. 12-1. Phosphorus. 4.31. 400 /. Toxic. 330 /. Compressed. 64-2600. 74-2400. 64-2800. 74-2400. Pentafluoride. 27.6. Corrosive. 642. Gas. 12-1. PH5. Silane. 1.1