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Using categorized defect learning to optimize photo processes Eric H. Bokelberg, James L. Goetz, and Michael E. Pariseau, IBM Microelectronics
be reached at 802/769-8964.) James L. Goetz is a technical lab specialist and member of the photolithographic process and equipment engineering team at IBM Microelectronics' Essex Junction facility. Since joining IBM as a technician in photolithography inspection in 1977, he has held assignments...
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MICRO:Process Equipment-Lithography, by Zhou Lin (Feb 99)
been a progression of changes in the filtration of the air supply to photo tools, and a chemical air filter integrated in the cluster tool lessens the possible airborne contamination level.5 In parallel, monitors have been developed to measure ambient contamination levels. Nevertheless, the materials...
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Dutch Unveil High-Tech Soldier System
will be made by the end of this year, followed by a contract award in early 2008, program officials say. The first complete mockup developed for the country's Soldier Modernization Program was presented on Feb. 14, at the TNO Defense, Security and Safety lab in Soesterberg. TNO has worked closely...
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INDUSTRY NEWS
DUARTE, CA Can a technique developed originally for space propulsion be relaunched as an economical and environmentally safe advancement for cleaning wafers in the submicron era? In their lab located in this small town near Pasadena home to NASA's Jet Propulsion Laboratory Julius Perel and John...
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Don't let regen rock your world
Regenerative power can trip up servo designs that must stop quickly. A 1.8-hp ac servo, whose business end is visible in the lower right portion of the photo, is one example of a motor application that benefits from the use of a regen resistor. The mechanism on which it resides is part...
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Everything you need to know about safety testing and certification
that can ease the T&C process: When requesting estimates from a T&C lab, first tell them what the product is, what it does, what it looks like, and the countries and environments it will be used in. Send a photo, if possible, along with a list of components, materials, and possible alternative components...
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MICRO: Brainstorming Team
OF INTERNATIONAL SEMATECH. The brainstorming team drafted John Donahue, an equipment maintenance technician at Sematech, to help build a prototype. Sparks says Gondran found enough money in the lab budget to pay for construction of the BEAT. Meanwhile, Sparks met with Gary Donahue, John's brother...
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MICRO:Industry News:Lead (Nov/Dec '98)
it is absolutely perfectly placed, would be of less concern to a MEMS device. TESTING: Danelle Tanner of Sandia National Laboratories tests MEMS reliability using the SHiMMeR, a tool developed at the lab. Images at right show MEMS pin joint holes in unstressed and stressed conditions. Photo by Randy...
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MICRO:Industry News:Lead (April '99)
for removing submicron-sized particles using inert gases, mechanical vibration, and plasma forces. This nitrogen plasma-source prototype at UCLA lab holds promise as economical, "green" method for cleaning substrates. Photo courtesy of UCLA Plasma Process Engineering Laboratory. Called Plasmax, the latter...
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Bringing High Reliability Testing to the Battlefield (.pdf)
In most precision test applications-whether in the lab, on the production floor or in the field-cables are constantly moved with repetitive flexures. In all of these applications it is absolutely necessary to have reliable test and measurement components that provided precise electrical stability...