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  • Description: Photolithography is the technique underlying all integrated circuit manufacture. To a large extent, the minimum feature size and the performance of ICs is determined by the resolution achievable in this step. Also, the process yield has a strong impact on a Fab's economy. The troubleshooting

    • Continuing Education Credit (CEU): Yes
    • Modality: Off Site (Conference / Seminar), On-site / In Plant
    • Technology / Subject: Nanomaterials / Nanotechnology, Photonics / Optics, Semiconductors / Microelectronics (ICs), Specialty / Other

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  • Description: No Description Provided

    • Services: Design / Engineering, Prototyping, Pilot / Scale-Up, Production, R & D / Development, Specialty / Other
    • Capabilities: 2D / Surface Micromachining, 3D / Bulk Micromachining, Dielectric / CVD Thin Film, Dry Etching (Plasma / RIE), Inspection / Testing, Metallization - Electroplating, Metallization - PVD Thin Film, Photolithography, Wet / Chemical Etching, Other
    • Materials: Silicon, Ceramic, Compound Semiconductor, Glass, Quartz, SOI, Specialty / Other
    • Location: North America, United States Only, Northeast US Only

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  • Description: contact photolithography with a mask aligner to define the pattern on the glass substrate. Once the pattern is defined, we then chemically etch the substrates and clean them in a class 100 cleanroom. The finished test targets are then checked with a critical dimension (CD) tool that is calibrated

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  • Description: Design and Manufacturing Services One size does not fit all. Whether it is design assistance, custom products or smaller volumes, clients need flexible solutions instead of rigid excuses. In addition to our standard products, we offer an array of design and manufacturing services. As the leader

    • Services: Design / Engineering, Prototyping, Pilot / Scale-Up, Production, R & D / Development, Specialty / Other
    • Capabilities: 2D / Surface Micromachining, 3D / Bulk Micromachining, Inspection / Testing, Oxidation / Doping, Packaging / Backend Processing, Photolithography, Wafer Bonding, Wet / Chemical Etching, Other
    • Materials: Silicon, Ceramic, Glass, Metal / Nickel, Polymer / Organic, Specialty / Other
    • Location: North America, United States Only, Southwest US Only

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Conduct Research Top

  • Concentration Sensors Curb Rising CoO (.pdf)
    Developments in IC manufacturing are increasing the demand of in situ concentration measurement in liquid chemicals are consumed in significantly greater quantities for chemical mechanical planarization (CMP), photolithography, electrochemical deposition (ECD) and surface preparation.
  • MICRO: Product In Action (June '2000)
    As chipmakers grapple with the stringent requirements of deep ultraviolet (DUV) photolithography, they confront a wide range of organic contaminants--from amines, halogens, and radicals to chlorine, bromide, and arsine. To remove such contaminants, most fabs have added chemical filters
  • MICRO: Products
    The SpinBall is a single-wafer spin coater/developer specifically for R &D labs and specialty production fabs. Designed for the application of photolithography chemicals, the station provides uniform, precise, and repeatable process results through its advanced aerodynamic cup design. Based
  • MICRO: Rebuilding Copperopolis - Biolsi (July 2000)
    process steps, or shorts as a result of scratches caused during chemical-mechanical polishing (CMP), an integral but dirty step in copper processing. Defect sources can be classified into four categories: particulate, metallic, organic, and other types. Particles deposited on the wafer can cause
  • MICRO: Sutton (April 2001)
    Chris Lansford, Clint Miller, and Dan Sutton, Monitoring of defect excursions and research into their generation mechanisms can facilitate the integration of a cost-saving prewet step into a photoresist process. As i-line and deep ultraviolet (DUV) photolithography processes have grown more complex
  • MICRO: Product Technology News (April 2001)
    A simulation tool set enables photolithography engineers and IC designers to predict the manufacturability of their products before production. The LithoCruiser helps design and optimize lithography processes. It allows viewing of the lithography process windows based on the simulation of circuit
  • Metrigraphics Article in Today's Medical Developments
    for precision manufacturing. Metrigraphics, a division of Dynamics Research Corporation has grown into a worldwide supplier of high precision custom components for designers and builders of medical and analytical instruments and devices - applying their core technologies of electroforming, photolithography

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