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Physical Vapor Deposition Coating Equipment

 

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Coating equipment is used to apply organic, inorganic or metal coatings onto part surfaces for industrial applications.
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  • HumiSeal(R) 1B31S (.pdf)
    1B31S with HumiSeal Thinner 503 in order to obtain a uniform film. Once optimum. viscosity is determined, a controlled rate of immersion and withdrawal (2 to 6" per minute) will further insure even. deposition of the coating and ultimately a uniform film. During the application, evaporation of solvent
  • HumiSeal(R) 1B31 (.pdf)
    ) will further insure. even deposition of the coating and ultimately a uniform film. During the application, evaporation of solvent causes. an increase in viscosity that should be adjusted by adding small amounts of Thinner 503. Viscosity in the dip tank. should be regularly checked by the use
  • Chipmakers move to Second-Generation Copper
    patterned and etched for interconnections. The interconnection etch stops at the second SiNx layer. Once holes for vias and trenches for connections have been etched, the process next deposits a thin film of tantalum nitride through physical vapor deposition (PVD), or sputtering. This acts
  • HumiSeal(R) 1B73 (.pdf)
    and withdrawal (2 to 6" per minute) will further insure even. deposition of the coating and ultimately a uniform film. During the application, evaporation of solvent causes an. increase in viscosity that should be adjusted by adding small amounts of Thinner 73. Viscosity in the dip tank should
  • HumiSeal(R) 1B66 (.pdf)
    rate of immersion and withdrawal (2 to 6" per minute) will further insure even. deposition of the coating and ultimately a uniform film. During the application, evaporation of solvent causes an. increase in viscosity that should be adjusted by adding small amounts of Thinner 503. Viscosity in the dip
  • Examining scale-up and computer simulation in tool design for 300-mm wafer processing
    flows are encountered in LPCVD, high-plasma-density/low-gas-pressure reactors, physical vapor deposition (PVD), molecular beam epitaxy (MBE), and high-vacuum processes. For such high numbers, direct simulation Monte Carlo (DSMC) and other kinetic simulations become necessary.2 The actual flow field
  • MICRO: Archive: 2002 Back Issues
    e-manufacturing in the semiconductor industry. TECHNICAL ARTICLES. Taking Control: Improving equipment productivity through on-product etch-process monitoring. Facilities Technology: Reducing water consumption in semiconductor fabs. BEOL Equipment: Using atomic layer deposition to. prepare future-generation
  • MICRO:Archives of 1997 Back Issues
    enters Millennium; Vitesse promotes Mikkelson; Duffin takes ESH slot at Sematech Foreign chip industries apply themselves to eclipsing U.S. Deposition breakthrough brings consortium to dawn of the Copper Age Flanders flips for chips; Triant inks software pact; Air Liquide signs contract with AMD; ASM

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