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Sizing and Selecting Metering Pumps Planning a Metering Pump Installation (.pdf)
be avoided with. of the fluid being pumped, leakage cannot be tolerated. viscous or abrasive chemicals. Select a driver matching the available utilities which. When a metering pump is controlled by automatic,. may include electric, air, gas or other means of driving. electric or pneumatic stroke positioners
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Air Dryers
Water vapor is contained in high-pressure air. In vapor form, the water does little damage in most components. But if the water is allowed to condense in the system, it can rust pipes, freeze up actuators, and damage a process, tool, or instrument. Manufacturers of pneumatic components normally
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MICRO:June 98:Semicon West Exhibitors - page 2
Products and Chemicals High-Pressure POU Purification of Corrosive Gases Robert Torres, Matheson Gas Products (plus panel discussion with presenters) Workshop on Contamination in Liquid Chemical Distribution Systems Program Chairs: Jennifer Sees, Texas Instruments; and John Bare, FSI International
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MICRO:March 1998:Product Technology News (p.122)
The ViPRR variable-input pneumatic retaining ring produces uniformity to within 3 mm of the wafer's edge. For use on the company's Symphony-CMP and Model 6DS-SP CMP tools, the carrier can be employed for advanced planarization applications to 0.18 um. It is made of corrosion-resistant titanium
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MICRO:Product Technology News (May '99)
of three-position, high-vacuum pneumatic slow pump valves that reduce turbulence within vacuum systems. Because a bypass valve opens first, a slow pumping action is achieved. Once the system reaches a determined vacuum level, the parent valve is opened, allowing full pumping speed. SPV valves feature removable
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Vacuum and Pressure Handbook: Pressure Accessories and Systems
pneumatic systems to remove dust. and other foreign particles from air entering the compressor. The amount of dirt, moisture,. or corrosive gases in the inlet air will dictate the type of filtering or purification equipment. required. For proper service, the filter element must be cleaned or replaced
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Product Technology News
mechanisms. Electronic Flowmeter NT International Minneapolis, MN The Model 4400 electronic flowmeter measures both the flow and pressure of UHP chemicals and highly corrosive process materials. The unit measures the differential pressure across an orifice machined into a single Teflon body
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MICRO:Archive:Back Issue TOC
on exhibitors PRODUCT TECHNOLOGY NEWS Products: Wafer-handling robot, dielectric etch system, CD-SEM, CVD process monitor, piping system, vacuum wand, yield management software, ICP-MS, wafer inspection system, benchtop plasma systems, 300-mm cluster tool, pneumatic diaphragm valves, pressure controller