The PCO2-14 ™
Polyimide Cure solution is a clean process oven designed for
polyimide baking, curing, and sterilizing applications. Many semiconductor manufacturing environments, front-end machines are adapted for
polyimide curing. This costly process results in equipment typically not suitable for
polyimide curing in terms of cleanliness, inert atmosphere capabilities, cycle time or data acquisition. The PCO2-14 ™ optimizes the
polyimide curing process for semiconductor wafer...
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