Polymer Vapor Testing System

Conduct Research

• MICRO: Testing liquid-handling system components to ensure purity and reliability
  potential, current leakage, structural defects in vapor-grown epitaxial layers, and reduced breakdown voltage of gate oxides. While the need for ultraclean equipment has long been clear, cleanliness guidelines for the manufacturers who produce such systems have been slow in coming. SEMI has recently...
• MICRO: Testing self-primed spin-on low-k materials to optimize the cost of ownership
  flow. A simple process flow was chosen to isolate as much as possible the potential differences between the two formulations and deposition processes from the multitude of subsequent integration process steps. The two test resins are based on the same organic polymer and solvent system and have...
• Measuring SF6
  , The specifications of a standard InfraRan Specific Vapor Analyzer, factory calibrated for SF6, (Part No. 405-2000-1017). meets the requirements for accuracy and response time. The standard range of 0 ­ 10 ppm is suitable with modern practice in. fume hood testing that minimizes the amount of SF6 released...
• Plastics for the long haul
  Polymer selection helps automotive fuel-system components survive for the life of the vehicle. Ticona, the technical polymers business of Celanese AG The tank flange (left) and pump (right) from Siemens VDO convey fuel and sense tank fill levels. These components are in constant fuel contact over...
• MICRO: Product Tech News
  of hazardous chemicals. Because the dry ice particles disappear on impact, the unit eliminates secondary waste streams. It is used for cleaning wafers, stripping high-dose implanted photoresists, cleaning polymer films off anodized or spray-coated aluminum chambers, cleaning valve bellows and quartzware...
• MICRO:Building Copperopolis (Jan '99)
  u -cm for bulk copper), which can help improve device performance though greater speed and smaller resistance capacitance time constants; high current density; and good resistance to electromigration. In addition, it can be deposited by a variety of techniques physical and chemical vapor deposition...
• Comparing cleanroom wipers with a dry abrasion resistance test
  equipment are being cleaned after sputtering, etching, chemical vapor deposition, or chemical-mechanical polishing. The goal of the study reported in this article, therefore, was to develop a dry test that would allow comparison of wipers on the basis of particle release caused by. MICRO:October...
• Comparing the molecular contamination contribution of clean packaging films
  in generic polymer films exhibited excessive levels of hydrocarbons. Figure 1: Black residues from packaging materials collected on cleanroom wipes prior to component installation. Figure 1 shows examples of black residue collected from the surfaces of a component packaged in a polymeric film. Because...
• MICRO: Product Technology News (July '2000)
  at throughput rates up to 70 wafers per hour. It is compatible with seed and barrier deposition, either sputtered or deposited by chemical vapor means. The system offers mean time between failures of >250 hours and mean time to repair of <2 hours. Through integrated cleaning, it provides convenient dry-in...
• MICRO:June 98:Semicon West Exhibitors - page 2
  .....12202 Intertek Testing Services.....12011-1 InTest.....10942 Ion Systems.....11337 Ishii Tool & Engineering.....11908 Ismeca.....11632 ITW Philadelphia Resins.....13210 Iwatani..... 9117 JEM..... 9410 JEOL.....10030 Johnson Matthey Electronics.....11744 Johnstech International..... 9316...

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