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  • MICRO:Top 25 (November/December 2002)
    is available in wafer sizes of 300, 200, and 150 mm. A large calibration area of 800 800 um extends product lifetime, since the user is not limited to measuring in the same spot continuously. A UPW boron analyzer measures parts-per-trillion levels of boron in DI- and ultrapure-water applications
  • MICRO:March 1998:Product Technology News (p.122)
    , which makes it compatible with most CMP slurries. The ring is made of PET, a thermoplastic polyester that demonstrates stiffness, chemical and abrasion resistance, and low center line porosity. The WT-8000 system automatically transfers wafers, decreasing scratches from vacuum wands and eliminating

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