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  • MICRO:Top 25 (November/December 2002)
    roughnesses with high accuracy. Other substrate parameters such as porosity, texture, and stress can be measured as well. The systems use the company's X-Ray Microsource, which provides high x-ray flux on sample spots ranging in size from 500 500 um down to 100 100 um, which makes the tools suitable
  • MICRO:March 1998:Product Technology News (p.122)
    , which makes it compatible with most CMP slurries. The ring is made of PET, a thermoplastic polyester that demonstrates stiffness, chemical and abrasion resistance, and low center line porosity. The WT-8000 system automatically transfers wafers, decreasing scratches from vacuum wands and eliminating

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