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Precision Flatness Measurement

 

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Interferometers measure distance in terms of wavelength and determine the wavelengths of light sources.
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  • Rapid Deployment OEM Sensor for High Precision Measurement Applications
    Capacitance based measurement probes have long been employed for high precision non-contact measurement. The ability to customize the probe/amplifier configuration makes them a popular choice for measurement applications demanding maximum accuracy and repeatability. One specific area where
  • MTII Provides Dimensional Measurements for an Automated Construction Blocks and Paver Qualifier
    , many manufacturers are looking to control product tolerances steadier than ever before. Solution: A major manufacturer of automated block qualification machines approached MTII looking for a cost effective, high precision laser measurement system for their new generation block qualifier. Their goal
  • Brake Rotor Analysis Using Non-Contact Measurement Sensor
    . Figure 1. Figure 2. MTII also manufactures high precision laser and fiber-optic systems with resolution to 0.04 micro-inch (1 nm) and frequency response to 500 kHz. Contact MTI’s experienced Application Engineers for solutions to your difficult measurement needs. NewslettersApplication
  • Thermal Expansion Measurements on Operating Automobile Engines
    triangulation, fiber-optic and capacitance measurement technologies. The Semiconductor Products sensor group manufactures manual, semi-automated and fully automated wafer characterization tools designed to measure wafer thickness, total thickness variation (TTV), bow, warp and flatness of semi-insulating
  • Infrared Sensor Graphic Interface PVC Sheet Material
    site-flatness measurement precision offers chipmakers good control of polishing, which improves yields of fine-line-geometry devices. The multigenerational tool has automated noncontaminating edge-grip wafer-handling capability and supports the ITRS at the 90-, 65-, and 45-nm nodes. In addition
  • MICRO:Product News
    200SA provides accurate and repeatable measurements of thickness, total thickness variation, bowing, warping, and site and global flatness. Push-pull capacitance technology is used to deliver noncontact full-wafer surface scanning. User-defined and ASTM/SEMI scan patterns are used to generate a full
  • Constant velocity in positioning systems
    Smooth motion is key to precision; Here are some tips on how to get it. An automatic optical inspection rig uses a Bayside custom gantry on a composite base with caged, recirculating bearings. Specs: 0.1-m m resolution; 60-kg moving mass; straightness = +-5 m/400 mm; flatness = 1.27 m/25 mm; 20-kHz
  • Product Technology News
    at magnifications >20,000x. A Windows-based interface makes the XL810 easy to use. (Semicon/West, San Francisco, South Hall, Booth 2715) An x-y stage is made specifically for use with 300-mm wafers. Preloaded air bearings and precision granite reference surfaces provide straightness and flatness of travel

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