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Precision Optics Metrology System

 

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Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
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  • MICRO: Defect/Yield Metrology - Schramm (October 2000)
    overlay metrology. For example, conventional measurement optics require step heights >50 A to provide sufficient signal and contrast for the system's algorithms to function properly, but advanced CMP processes can result in step heights of <20 A. CMP further complicates the measurement task
  • Utilizing Laser Technology in Dimensional Metrology Applications
    of a probe that contacts the part (a mechanical comparison). Labmasters employ patented laser paths that are in-line with the measurement axis to minimize Abbe2 error. The probes and associated optics are guided along very accurate low friction slides by precision force systems to minimize instrument
  • Measuring Surface Slope Error on Precision Aspheres (.pdf)
    . There are a number of different metrology tools which can be used to measure the surface slope of optics. Table 2 ­ Metrology Instruments for measuring surface slope errors. Examples of commercial. Instrument Comments instruments. Contact profilometers. Profilometers usually measure. Taylor Hobson, Mititoyo
  • The Automation Renovation: Planning Your First Vision System (.pdf)
    will influence the optics. And most ­ if not all ­. image processing packages offer sub-pixel accuracy, so you'll be sure to get the required precision from your images... if you have the right lens. Your application's expected speed is another factor. you need to consider in stage one. You need to know
  • Vision Systems for Wafer and Thin-Film Instrumentation
    or image-capture device with processing, storage, analysis and control systems for automated inspection, metrology or image analysis end-use in laboratory or clean room settings. Typically, vision systems for wafer and thin-film instrumentation are stationary with high-magnification optics, as well
  • MICRO: Industry News: Expansions and Acquisitions (April 2001)
    009;Corning, the New York based supplier of microlithography optical materials, broadened its line of product offerings with the acquisition of Tropel. The $190-million deal closed in March. Located in Fairport, NY, Tropel manufactures precision optics and metrology tools. Corning says Tropel's
  • MICRO: The Hot Button
    indicated that these nonvisual defects represented a large percentage of the causes of yield loss at electrical test. For defect review, the speed and accuracy of automated defect classification continues to be an issue. BILL GATELY (general manager, Philips Advanced Metrology Systems): The move to copper
  • MICRO: 2004 Greatest Hits
    . The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization with excellent

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