Precision Optics Metrology Tool

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• MICRO: Industry News: Expansions and Acquisitions (April 2001)
  009;Corning, the New York based supplier of microlithography optical materials, broadened its line of product offerings with the acquisition of Tropel. The $190-million deal closed in March. Located in Fairport, NY, Tropel manufactures precision optics and metrology tools. Corning says Tropel's...
• MICRO: Defect/Yield Metrology - Schramm (October 2000)
  of the metal layers compensates for the low topography, so that enough optical signal is supplied to the metrology tool for adequate measurement. In front-end CMP processes such as STI, however, the registration marks are much more difficult to observe. Robust broadband optics with spatial filtering...
• Measuring Surface Slope Error on Precision Aspheres (.pdf)
  . There are a number of different metrology tools which can be used to measure the surface slope of optics. Table 2 ­ Metrology Instruments for measuring surface slope errors. Examples of commercial. Instrument Comments instruments. Contact profilometers. Profilometers usually measure. Taylor Hobson, Mititoyo...
• MICRO: The Hot Button
  Pressures Build on Tool Performance Shrinking feature sizes, tighter control of device electrical parameters, such as threshold voltage and leakage current, and new interconnect materials will provide the main challenges for physical metrology methods." So says the metrology chapter in the latest...
• MICRO: 2004 Greatest Hits
  . The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization with excellent...
• MICRO: Prod Tech news
  The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization...
• MICRO: Product Technology News (June '2000)
  sites/wafer, while real-time measurement analysis provides rapid process feedback. Its proprietary optics and advanced measurement algorithms optimize measurement integrity and precision. Measurement data are accessible via network connections, and user-defined recipes are fully transferable...
• MICRO:Product News
  such as point, line, radius, angle, and distance can be used for contour measurement. By teaching the first part in a batch, a program can be developed and recalled to automatically inspect the remaining parts. A semiautomated metrology tool is capable of handling 75- to 200-mm wafers. The Proforma...
• MICRO: Products
  An overlay metrology tool that performs lithography process control for the 65-nm node and beyond captures design-rule overlay errors and improves stepper correction accuracy. The Archer AIM uses a grating-style technology to reduce the measurement uncertainty associated with traditional overlay...
• MICRO:Top 40 (Nov '00)
  independent polishing platens, cleaning capability, advanced metrology, and automation. The single tool accommodates simultaneous process development and production operation and supports hot-lot processing. It is designed to ease the transition among oxide, tungsten, shallow-trench isolation, and copper...

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